Semiconductor and Microelectronics Manufacturing

2025-03-27

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Semiconductor and Microelectronics Manufacturing

Application Overview

In semiconductor and microelectronics manufacturing, MFC mass flow controllers are core devices that ensure process accuracy and consistency. Accu Technology's MFCs, with their high precision and rapid response, meet most process requirements.

Application Scenarios

Wafer processing, etching, chemical vapor deposition (CVD), physical vapor deposition (PVD), ion implantation, ultra-pure chemical (photoresist, etchant) delivery, CMP slurry control, etc.

Recommended Products

ACU10FA

ACU10FA

The ACU10FA analog mass flow controller boasts fast response and high accuracy. It offers a wide control range, spanning 5 SCCM to 30 SLM, with the ability to measure and regulate flow as low as 1 SCCM, making it suitable for controlling very small flow rates.

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ACU10FD

ACU10FD

The ACU10FD digital mass flow controller consists of a mass flow sensor, a laminar flow element, a flow control valve, and an amplifier control circuit. It uses digital signal input and output and features a short preheating time, small zero drift, and high reliability.

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ACU10FDR

ACU10FDR

The ACU10FDR low differential pressure gas mass flow controller, equipped with a proprietary high-flow electromagnetic valve, is suitable for controlling mass flow in situations with minimal available system pressure. The low differential pressure ensures minimal impact on the system, enabling flow control under near-atmospheric pressure conditions and reducing system response time. We will customize the valve and PID control functions for you based on your application parameters to ensure that the product can achieve fast and stable control while maintaining low pressure loss.

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