Semiconductor and Microelectronics Manufacturing

2025-03-27

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Semiconductor and Microelectronics Manufacturing

Application Overview

In semiconductor and microelectronics manufacturing, MFC mass flow controllers are core devices that ensure process accuracy and consistency. Accu Technology's MFCs, with their high precision and rapid response, meet most process requirements.

Application Scenarios

Wafer processing, etching, chemical vapor deposition (CVD), physical vapor deposition (PVD), ion implantation, ultra-pure chemical (photoresist, etchant) delivery, CMP slurry control, etc.

Recommended Products

ACU10FA

ACU10FA

The ACU10FA analog-type mass flow controller features fast response and high precision. It offers a wide control range, with a flow rate capability spanning from 5 SCCM to 30 SLM, and can accurately measure and regulate flows as low as 1 SCCM—making it ideal for controlling even the tiniest gas flows.

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ACU10FD

ACU10FD

The ACU10FD digital mass flow controller consists of a mass flow sensor, laminar flow separator, flow controller regulating valve, and amplification control circuit. It features digital signal input and output, offering advantages such as short preheating time, minimal zero drift, and high reliability.

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ACU10FDR

ACU10FDR

The ACU10FDR low-pressure-drop gas mass flow controller is equipped with a proprietary high-flow electromagnetic valve, making it ideal for controlling mass flow even when system pressure is nearly unavailable. Its minimal pressure differential ensures the least possible impact on the system, enabling precise flow control under near-atmospheric conditions while significantly reducing system response time. We can customize the valve and PID control features based on your specific application parameters, guaranteeing fast, stable performance with minimized pressure loss.

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