Semiconductor and Microelectronics Manufacturing

2025-03-27

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Semiconductor and Microelectronics Manufacturing

Application Overview

In semiconductor and microelectronics manufacturing, MFC mass flow controllers are core devices that ensure process accuracy and consistency. Accu Technology's MFCs, with their high precision and rapid response, meet most process requirements.

Application Scenarios

Wafer processing, etching, chemical vapor deposition (CVD), physical vapor deposition (PVD), ion implantation, ultra-pure chemical (photoresist, etchant) delivery, CMP slurry control, etc.

Recommended Products

ACU20FD Normally Open Valve Series

ACU20FD Normally Open Valve Series

The ACU20FD digital mass flow meter consists of a mass flow sensor, a laminar flow splitter, a flow-control regulating valve, and an amplification and control circuit. It features digital signal input and output, short warm-up time, minimal zero drift, and high reliability.

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ACU20PH Series

ACU20PH Series

The ACU20PH series comes standard with a piezoelectric diaphragm pressure sensor and a digital circuit board, delivering high-precision, stable, and reliable pressure measurement and control. This basic digital PC board incorporates all the essential functions required for measurement and control. In addition to the standard RS485 output signal, the ACU20PH also provides analog I/O signals.

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ACU10FA

ACU10FA

The ACU10FA analog-type mass flow controller features fast response and high precision. It offers a wide control range, with a flow rate capability spanning from 5 SCCM to 30 SLM, and can accurately measure and regulate flows as low as 1 SCCM—making it ideal for controlling even the tiniest gas flows.

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