Pressure Controller
The ACCU pressure controller utilizes an advanced piezoelectric diaphragm pressure sensor and digital circuit design to ensure the accuracy, stability, and reliability of pressure measurement and control. Its core sensing element employs a silicon-based piezoresistive bridge structure. An ultra-thin pressure-sensitive diaphragm is etched onto the back of a precisely machined silicon chip; the diaphragm thickness is precisely matched to different range requirements. When external pressure acts on the diaphragm, its deformation causes a change in the resistance of the Wheatstone bridge, thereby outputting a highly linear pressure signal. The ACCU dual-valve pressure controller innovatively integrates an intake and pressure relief dual solenoid valve structure to achieve dynamic closed-loop control. The intake valve precisely regulates the input of process gas, maintaining the set pressure in the chamber; when the pressure exceeds the limit, the pressure relief valve responds quickly and automatically opens to release excess pressure. This design significantly improves the response speed and stability of pressure control, ensuring that the system can maintain precise and reliable pressure regulation even under complex operating conditions.
Measuring range: 10KPa-10MPa
Measuring range: 10KPa-10MPa
Range: 10SCCM～250SCCM
Contact Information
Address: Room 1522/23, Building B, Ruichuang International Center, No. 8 Wangjingdong Road, Chaoyang District, Beijing (R&D Department)
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