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ACU20PCD Series

The ACU20PCD dual-valve pressure controller integrates two solenoid valves: the inlet valve introduces process gas into the chamber to maintain pressure in the sealed space, while the relief valve automatically opens when the pressure exceeds the set limit to release excess pressure, thereby rapidly and precisely stabilizing the pressure and minimizing gas waste.

Product Description

  • Product Description
  • I. Product Overview

    The ACU20PCD dual-valve pressure controller integrates two solenoid valves: the inlet valve introduces process gas into the chamber to maintain pressure in the sealed space, while the relief valve automatically opens when the pressure exceeds the set limit to release excess pressure, thereby rapidly and precisely stabilizing the pressure and minimizing gas waste.

    The ACU20PCD comes standard with a pressure sensor and a digital circuit board, delivering high-precision, fast-responding, and reliable pressure control; the PC digital board incorporates all functions required for pressure regulation. In addition to the standard RS485 output signal, the ACU20PCD also features analog input/output signals, enabling precise control of the entire process simply by adjusting the setpoint. A touch-screen display further enhances ease of operation. The ACU20PCD dual-valve pressure controller can be equipped with either an integral control valve or a split-type control valve. It is a proportional solenoid-controlled valve that offers ultra-fast response and smooth control characteristics. We offer various series of control valves tailored to specific application areas: standard direct-operated valves for general applications, pilot-operated valves for high-flow applications, and dual-valve configurations for pressure stabilization and relief applications.

    II. Product Applications

    Application areas: semiconductor manufacturing, scientific research and experimentation, biopharmaceuticals, energy and chemical industries, leak testing, fuel cells, vacuum coating, and process control, among others.

    III. Product Specifications

    Series ACU20PCD ACU20PCDR
    Model LC LM MC Miss British Columbia BM British Columbia BM
    Preheating time

    Negligible

    Accuracy

    ±0.5% F.S

    Repeatability

    ≤0.1%

    Working differential pressure

    0.05–0.5 MPa (customizable upon request)

    Sensor response time

    0.2s

    Range ratio 20:1 50 to 1 20:1 50 to 1 20:1 50 to 1 20:1 50 to 1
    Control stability

    ≤±0.05% F.S (measurement conditions: 1 L/min N2)

    Analog quantity

    0–5 V, 4–20 mA

    Digital quantity

    RS232/485, MODBUS protocol

    Power supply

    24VDC

    Operating temperature

    -10~+70℃

    Temperature sensitivity

    0.1%FS/°C

    Directional Influence Degree (90° Change)

    <0.03 kPa (absolute pressure / gauge pressure sensor)

    <0.6 kPa (differential pressure sensor)

    Electrical Connection

    DB9 pin

    Protection rating

    IP40

    Leak rate

    1 times 10 -9 Pa m³/s

    Valve

    Valve normally closed

    /

    Valve normally closed

    /

    Valve normally closed

    /

    Valve normally closed

    /

    Base material

    Stainless steel

    Sealing material

    Fluororubber, nitrile rubber, EPDM, perfluoroether

    Body thread

    G3/8 internal thread

    G1/2 internal thread

    Joint

    Ferrules, ferrules with a tower-shaped design, quick-connect fittings, VCR fittings, flanges, and more

    IV. Product Dimension Drawing

    ACU20PCD-LC Dimensional Drawing

    ACU20PCD-MC Dimensional Drawing

    ACU20PCD-BC Dimensional Drawing

    ACU20PCDR-BC Dimensional Drawing

    V. Optional Accompanying Measurement and Control Software (Additional charges apply)

    Mass Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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