ACU20PCD-LC Dimension Drawing
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ACU20PCD
The ACU20PCD dual-valve pressure controller integrates two solenoid valves. The inlet valve introduces process gas into the chamber, maintaining the pressure in the sealed space. When the pressure is too high, the pressure relief valve automatically opens to relieve pressure, quickly and accurately controlling pressure stability while avoiding gas waste.
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Product Description
- Product Description
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I. Product Overview
The ACU20PCD dual-valve pressure controller integrates two solenoid valves. The inlet valve introduces process gas into the chamber, maintaining the pressure in the sealed space. When the pressure is too high, the pressure relief valve automatically opens to relieve pressure, quickly and accurately controlling pressure stability while avoiding gas waste.
The ACU20PCD comes standard with a pressure sensor and a digital circuit board, providing high-precision, fast, stable, and reliable pressure control. This PC digital board has all the functions required for pressure control. In addition to the standard RS485 output signal, the ACU20PCD also provides analog input/output signals, allowing precise control of the entire process by adjusting the setpoint. The touch screen makes operation more convenient. The ACU20PCD dual-valve pressure controller can be equipped with an integrated control valve or a separate control valve. It is a proportional electromagnetic control valve with ultra-fast and smooth control characteristics. We have different series of control valves for specific applications. Standard direct-acting valves are used for conventional applications, pilot valves for high flow rate applications, and dual valves for pressure stabilization and relief.
II. Product Applications
Application fields: Semiconductor production, scientific research, biomedicine, energy and chemical industry, leak testing, fuel cells, vacuum coating, and process control, etc.
III. Product Parameters
Series ACU20PCD Model LC LM MC MM BC BM Warm-up time Negligible Accuracy ±0.5%F.S Repeatability ≤0.1% Operating differential pressure 0.05-0.5MPa (Customizable) Sensor response time 0.2s Span Ratio 20:1 50:1 20:1 50:1 20:1 50:1 Control Stability ≤±0.05%F.S (Test conditions: 1 L/min N2) Analog 0～5V、4～20mA Digital RS232/485, MODBUS protocol Power Supply 24VDC Operating Temperature -10~+70℃ Temperature Sensitivity 0.1%FS/℃ Orientation Influence (90° change) ＜0.03 KPa (Absolute/Gauge pressure sensor) ＜0.6 KPa (Differential pressure sensor) Electrical Connection DB9 port Protection Level IP40 Leak Rate 1×10-9Pa m³/S Valve Valve Tightly Closed / Valve Tightly Closed / Valve Tightly Closed / Base Material Stainless steel Sealing Material Viton, Nitrile rubber, EPDM, Perfluoroether Body Thread G3/8 inner thread G1/2 inner thread Connector Compression fitting, Pagoda, Quick-connect, VCR, Flange, etc. IV. Product Dimension Drawings
ACU20PCD-MC Dimension Drawing
V. Optional Matching Monitoring and Control Software (Additional charges apply)
Mass flow monitoring and control system V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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