ACU20PCD-LC Dimension Drawing
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ACU20PCD Series
The ACU20PCD dual-valve pressure controller integrates two solenoid valves: the inlet valve introduces process gas into the chamber, maintaining the pressure in the sealed space. When the pressure exceeds the set limit, the relief valve automatically opens to release excess pressure, ensuring rapid and precise pressure stabilization while preventing gas waste.
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Product Description
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I. Product Overview
The ACU20PCD dual-valve pressure controller integrates two solenoid valves: the inlet valve introduces process gas into the chamber, maintaining the pressure in the sealed space. When the pressure exceeds the set limit, the relief valve automatically opens to release excess pressure, ensuring rapid and precise pressure stabilization while preventing gas waste.
The ACU20PCD comes standard with a pressure sensor and a digital circuit board, offering high-precision, fast, stable, and reliable pressure control. The PCD digital board is equipped with all the functions necessary for precise pressure regulation. In addition to the standard RS485 output signal, the ACU20PCD also provides analog input/output signals, enabling accurate control of the entire process simply by adjusting the setpoint. Meanwhile, the touch-screen display makes operation even more convenient. The ACU20PCD dual-valve pressure controller can be fitted with either an integrated control valve or a split-type control valve. It features a proportional solenoid-controlled valve with ultra-fast and smooth control performance. We offer various series of control valves tailored to specific application fields. For general applications, we use standard direct-acting valves; for high-flow-rate applications, we recommend pilot-operated valves; and for applications requiring stable pressure regulation and pressure relief, we suggest using dual-valve systems.
II. Product Applications
Application fields: semiconductor manufacturing, scientific research and experimentation, biomedicine, energy and chemical engineering, leak testing, fuel cells, vacuum coating, and process control, among others.
III. Product Parameters
Series ACU20PCD Model LC LM MC MM BC BM Preheating time Negligible Accuracy ±0.5% F.S. Repetitiveness ≤0.1% Working differential pressure 0.05–0.5 MPa (customizable for special requirements) Sensor response time 0.2s Range ratio 20 to 1 50:1 20 to 1 50:1 20 to 1 50:1 Control stability ≤±0.05%F.S. (Measurement conditions: 1 L/min N2) Analog quantity 0–5V, 4–20mA Digital quantity RS232/485, MODBUS protocol Power supply 24VDC Operating temperature -10~+70℃ Temperature sensitivity 0.1%FS/℃ Directional Impact (90° Change) <0.03 kPa (absolute pressure/relative pressure sensor) <0.6 kPa (differential pressure sensor) Electrical connection DB9 hole Protection level IP40 Leak rate 1 × 10⁻⁹ Pa·m³/s Valve Valve normally closed / Valve normally closed / Valve normally closed / Base material Stainless steel Sealing material Fluororubber, nitrile rubber, ethylene propylene diene monomer (EPDM), perfluoroether Body thread G3/8 internal thread G1/2 internal thread Joint Card holders, towers, quick-connect fittings, VCRs, flanges, and more IV. Product Dimension Diagram
ACU20PCD-MC Dimension Drawing
V. Optional Supporting Measurement and Control Software (Additional charges apply)
Mass Flow Measurement and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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