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ACU10FC

The ACU10FC differential-pressure mass flow controller employs a differential-pressure-based mass measurement principle that features no thermal drift and zero response lag. It can simultaneously display and output parameters such as instantaneous flow rate, totalized flow, pressure, and temperature. When control functionality is required, an electromagnetic proportional control valve can be added, along with built-in PID regulation capabilities. Unlike thermal mass flow meters, the ACU10FC eliminates any additional "specific heat capacity" error when using gas conversion factors. As a result, even if the gas being measured differs from the calibration gas used at the factory, the measurement accuracy remains unaffected.

Product Description

  • Product Description
  • I. Product Overview

    ◆ No thermal drift, with negligible temperature and time drift; long-term stability of 0.1% F.S. per year

    ◆ Accuracy of 1.0%, with a range that can be set via buttons within a 100:1 ratio—no calibration required

    ◆ Instantaneous and cumulative flow, pressure, and temperature can be displayed simultaneously

    ◆ No warm-up required—no response lag during measurement

    ◆ Built-in 30 gas conversion factors with negligible additional error in specific heat capacity—no impact on accuracy

    The ACU10FC differential pressure mass flow controller employs a differential pressure-based mass measurement principle that ensures zero thermal drift and no response lag, allowing it to simultaneously display and output parameters such as instantaneous flow rate, totalized flow, pressure, and temperature. When control functionality is required, it can also be equipped with an electromagnetic proportional control valve and features built-in PID regulation capabilities. Unlike thermal mass flow meters, the ACU10FC differential pressure mass flow controller eliminates any additional "specific heat capacity" errors when using gas conversion factors. As a result, even if the gas being measured differs from the calibration gas used at the factory, measurement accuracy remains unaffected.

    II. Product Applications

    The ACU10FC series differential pressure mass flow controllers are widely used across various industries, including process manufacturing, food analysis, analytical testing, and metrology. Featuring multi-variable measurements and a highly adjustable 50:1 range ratio, a single ACU10FC differential pressure mass flow controller can effectively replace the functionality of multiple devices. With an accuracy of 1%, repeatability of 1%, and a control response time of less than 200 milliseconds, these controllers ensure reliable operation of process gases.

    3. Product Specifications

    SeriesACU10FC
    ModelLCLMMCMMBCBM
    Measurement range0–(2, 5, 10...1000) SCCM, 0–(1, 5, 10...30) SLM0 - (30, 40, 50...300) SLM0 - (300, 400, 500...3000) SLM
    Accuracy±1.0% of F.S.
    Repetitiveness±1% of F.S.
    Zero-point drift & Full-scale drift0.02% F.S./°C/Atm
    Work differential pressure0.1–0.5 MPa (specified upon order)
    Measurement range ratio50:1100:150:1100:150:1100:1
    Typical Response Time200 milliseconds (adjustable)
    Analog quantity0–5V, 4–20mA
    Digital quantityRS232/485, MODBUS Protocol
    Power supply24VDC
    Operating temperature+10 to +50°C
    Work pressure drop<0.01 MPa
    Work stress<1 MPa
    Electrical connectionDB15 port
    Protection LevelIP40
    Leak rate1 × 10⁻⁹ Pa·m³/s
    ValveValve remains closed/Valve remains closed/Valve remains closed/
    Base materialStainless steel
    Sealing materialFluororubber, nitrile rubber, EPDM, perfluoroether
    Surface ThreadG3/8 internal threadG1/2 internal thread
    ConnectorCrimpers, towers, quick-connect fittings, VCRs, flanges, and more

    4. Product Dimension Diagram

    ACU10FC-LC Dimension Drawing

    ACU10FC-LM Dimension Drawing

    ACU10FC-MC Dimension Drawing

    ACU10FC-MM Dimension Drawing

    ACU10FC-BC Dimension Drawing

    ACU10FC-BM Dimension Drawing

    5. Optional Supporting Measurement and Control Software (Additional charges apply)

    Quality Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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