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ACU10FC

The ACU10FC differential pressure mass flow controller uses a differential pressure mass measurement principle with no thermal drift and no response lag. It can simultaneously display and output: instantaneous flow rate, cumulative flow rate, pressure, temperature, etc. When a control function is required, an electromagnetic proportional control valve and built-in PID control function can be added. Unlike thermal flow meters, the ACU10FC has no additional "specific heat capacity" error when using gas conversion coefficients. Therefore, even if the measured gas is different from the calibration gas at the factory, it will not affect the measurement accuracy.

Product Description

  • Product Description
  • I. Product Overview

    ◆No thermal drift, negligible temperature drift and time drift, long-term stability 0.1%F.S/year

    ◆Accuracy 1.0%, range can be set by key within 100:1, no calibration needed

    ◆Instantaneous and cumulative flow, pressure, and temperature can be displayed simultaneously

    ◆No preheating required, no response lag during measurement

    ◆Built-in 30 kinds of gas conversion coefficients, no specific heat capacity additional error, does not affect accuracy

    The ACU10FC differential pressure mass flow controller adopts a differential pressure mass measurement principle with no thermal drift and no response lag. It can simultaneously display and output: instantaneous flow, cumulative flow, pressure, temperature, etc. When control function is needed, an electromagnetic proportional control valve and built-in PID control function can also be added. Unlike thermal flow meters, when using gas conversion coefficients, the ACU10FC differential pressure mass flow controller has no additional "specific heat capacity" error. Therefore, even if the measured gas is different from the calibrated gas at the factory, it will not affect the measurement accuracy.

    II. Product Applications

    The ACU10FC series differential pressure mass flow controllers are widely used in various industries, such as: process manufacturing, food analysis, analytical testing and measurement, etc. Multi-variable measurement and 50:1 adjustable range ratio allow a single ACU10FC differential pressure mass flow controller to replace the functions of multiple devices. Accuracy of 1%, repeatability of 1%, and a control response time of less than 200 milliseconds ensure normal operation of the process gas.

    III. Product Parameters

    SeriesACU10FC
    ModelLCLMMCMMBCBM
    Range0-(2,5,10...1000)SCCM, 0-(1,5,10...30)SLM0-(30,40,50...300)SLM0-(300,400,500...3000)SLM
    Accuracy±1.0%F.S
    Repeatability±1%F.S
    Zero Drift & Full Scale Drift0.02% F.S/ ºC/Atm
    Working Differential Pressure0.1~0.5MPa (specified when ordering)
    Range Ratio50:1100:150:1100:150:1100:1
    Typical Response Time200 milliseconds (adjustable)
    Analog Output0~5V、4~20mA
    Digital OutputRS232/485,MODBUS protocol
    Power Supply24VDC
    Operating Temperature+10~+50℃
    Operating Pressure Drop<0.01Mpa
    Maximum Operating Pressure1MPa
    Electrical ConnectionDB15 pin
    Protection LevelIP40
    Leakage Rate1×10-9Pa m³/S
    ValveValve Tightly Closed/Valve Tightly Closed/Valve Tightly Closed/
    Base MaterialStainless Steel
    Sealing MaterialViton, Nitrile Rubber, EPDM, Perfluoroether
    Body ThreadG3/8 inner threadG1/2 inner thread
    ConnectorCompression fitting, Pagoda, Quick-connect, VCR, Flange, etc.

    IV. Product Dimensions

    ACU10FC-LC Dimensions

    ACU10FC-LM Dimensions

    ACU10FC-MC Dimensions

    ACU10FC-MM Dimensions

    V. Optional Matching Measurement and Control Software (Additional charges apply)

    Mass Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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