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ACU10FC Series

The ACU10FC differential-pressure mass flow controller employs a differential-pressure-based mass‑flow measurement principle that exhibits no thermal drift and zero response lag, enabling simultaneous display and output of instantaneous flow, cumulative flow, pressure, temperature, and other parameters. When control functionality is required, it can be equipped with an electromagnetic proportional control valve and built-in PID regulation. Unlike thermal mass flow meters, the ACU10FC incurs no additional “specific heat capacity” error when using gas conversion factors; thus, even if the measured gas differs from the calibration gas used at the factory, measurement accuracy remains unaffected.

Product Description

  • Product Description
  • I. Product Overview

    ◆ No thermal drift; negligible temperature and time drift; long-term stability of 0.1% F.S./year.

    ◆ Accuracy of 1.0%; the measurement range can be set via keypad within a 100:1 span, with no calibration required.

    ◆ Instantaneous and cumulative flow, pressure, and temperature can be displayed simultaneously.

    ◆ No warm-up required; no response lag during measurement.

    ◆ Built-in with 30 gas conversion coefficients; negligible additional error in specific heat capacity, with no impact on accuracy.

    The ACU10FC differential-pressure mass flow controller employs a differential-pressure-based mass‑flow measurement principle that exhibits no thermal drift and zero response lag, enabling simultaneous display and output of instantaneous flow, cumulative flow, pressure, temperature, and other parameters. When control functionality is required, it can be equipped with a solenoid‑proportional control valve and built‑in PID regulation. Unlike thermal mass flow meters, the ACU10FC does not introduce additional “specific heat capacity” errors when gas conversion factors are applied. Consequently, even if the measured gas differs from the calibration gas used at the factory, measurement accuracy remains unaffected.

    II. Product Applications

    The ACU10FC series differential-pressure mass flow controllers are widely used across various industries, including process manufacturing, food analysis, and analytical testing and metrology. Their multi-variable measurement capabilities and 50:1 adjustable turndown ratio enable a single ACU10FC unit to replace the functionality of multiple devices. With 1% accuracy, 1% repeatability, and a control response time of less than 200 milliseconds, they ensure reliable operation of process gases.

    III. Product Specifications

    Series ACU10FC
    Model number LC LM MC MM BC BM
    Range of measurement 0–(2, 5, 10…1000) SCCM, 0–(1, 5, 10…30) SLM 0-(30,40,50...300)SLM 0-(300,400,500...3000)SLM
    Accuracy ±1.0%F.S
    Repeatability ±1%F.S
    Zero Drift & Full-Scale Drift 0.02% F.S/ °C/Atm
    Working differential pressure 0.1–0.5 MPa (to be specified at the time of order)
    Range ratio 50:1 100:1 50:1 100:1 50:1 100:1
    Typical response time 200 milliseconds (adjustable)
    Analog quantity 0–5 V, 4–20 mA
    Digital quantity RS232/485, MODBUS protocol
    Power supply 24VDC
    Operating temperature +10~+50℃
    Operating pressure drop <0.01 MPa
    Work stress <1 MPa
    Electrical connection DB15 port
    Protection rating IP40
    Leak rate 1×10-9 Pa·m³/s
    Valve Valve normally closed / Valve normally closed / Valve normally closed /
    Base material Stainless steel
    Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether
    Body thread G3/8 internal thread G1/2 internal thread
    Joint Ferrules, ferrule fittings, quick-connect couplings, VCR fittings, flanges, etc.

    IV. Product Dimension Diagram

    ACU10FC-LC Dimensional Drawing

    ACU10FC-LM Dimensional Drawing

    ACU10FC-MC Dimensional Drawing

    ACU10FC-MM Dimensional Drawing

    ACU10FC-BC Dimensional Drawing

    ACU10FC-BM Dimensional Drawing

    V. Optional Accompanying Measurement and Control Software (Additional charges apply)

    Mass Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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