ACU10FC-LC Dimension Drawing
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ACU10FC
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Product Description
- Product Description
 
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I. Product Overview
◆ No thermal drift, with negligible temperature and time drift; long-term stability of 0.1% F.S. per year
◆ Accuracy of 1.0%, with a range that can be set via buttons within a 100:1 ratio—no calibration required
◆ Instantaneous and cumulative flow, pressure, and temperature can be displayed simultaneously
◆ No warm-up required—no response lag during measurement
◆ Built-in 30 gas conversion factors with negligible additional error in specific heat capacity—no impact on accuracy
The ACU10FC differential pressure mass flow controller employs a differential pressure-based mass measurement principle that ensures zero thermal drift and no response lag, allowing it to simultaneously display and output parameters such as instantaneous flow rate, totalized flow, pressure, and temperature. When control functionality is required, it can also be equipped with an electromagnetic proportional control valve and features built-in PID regulation capabilities. Unlike thermal mass flow meters, the ACU10FC differential pressure mass flow controller eliminates any additional "specific heat capacity" errors when using gas conversion factors. As a result, even if the gas being measured differs from the calibration gas used at the factory, measurement accuracy remains unaffected.
II. Product Applications
The ACU10FC series differential pressure mass flow controllers are widely used across various industries, including process manufacturing, food analysis, analytical testing, and metrology. Featuring multi-variable measurements and a highly adjustable 50:1 range ratio, a single ACU10FC differential pressure mass flow controller can effectively replace the functionality of multiple devices. With an accuracy of 1%, repeatability of 1%, and a control response time of less than 200 milliseconds, these controllers ensure reliable operation of process gases.
3. Product Specifications
Series ACU10FC Model LC LM MC MM BC BM Measurement range 0–(2, 5, 10...1000) SCCM, 0–(1, 5, 10...30) SLM 0 - (30, 40, 50...300) SLM 0 - (300, 400, 500...3000) SLM Accuracy ±1.0% of F.S. Repetitiveness ±1% of F.S. Zero-point drift & Full-scale drift 0.02% F.S./°C/Atm Work differential pressure 0.1–0.5 MPa (specified upon order) Measurement range ratio 50:1 100:1 50:1 100:1 50:1 100:1 Typical Response Time 200 milliseconds (adjustable) Analog quantity 0–5V, 4–20mA Digital quantity RS232/485, MODBUS Protocol Power supply 24VDC Operating temperature +10 to +50°C Work pressure drop <0.01 MPa Work stress <1 MPa Electrical connection DB15 port Protection Level IP40 Leak rate 1 × 10⁻⁹ Pa·m³/s Valve Valve remains closed / Valve remains closed / Valve remains closed / Base material Stainless steel Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether Surface Thread G3/8 internal thread G1/2 internal thread Connector Crimpers, towers, quick-connect fittings, VCRs, flanges, and more 4. Product Dimension Diagram
5. Optional Supporting Measurement and Control Software (Additional charges apply)
Quality Flow Measurement and Control System V5.0
 
Keyword:
Semiconductor and Microelectronics Manufacturing
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