ACU20FDH-MC Control Unit Dimensions
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ACU20FDH
The ACU20FDH series high-temperature thermal mass flow controller uses a customized high-speed proportional control valve to quickly and accurately measure the volumetric flow/mass flow of high-temperature gas/steam with an accuracy of 0.5%.
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Product Description
- Product Description
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I. Product Overview
◆Rapid and accurate measurement of volumetric flow/mass flow of high-temperature gas/steam
◆Precise control of medium volumetric flow/mass flow using a customized high-speed proportional control valve
◆Large touch screen for easy operation, with open analog input/output and RS-485 digital communication
◆No moving parts or hot components inside, passed vibration test, insensitive to installation direction
◆Internal compensation laminar flow differential pressure technology ensures laminar flow even at high flow rates
◆Comprehensive user support, including technical consultation, quick equipment calibration service and conditional lifetime warranty
II. Product Applications
The ACU20FDH series high-temperature mass flow meter/controller is widely used in various industries, such as: process manufacturing, food analysis, analytical testing and measurement, etc.
Multi-variable measurement and 50:1 adjustable range ratio allow a single ACU10HT mass flow meter & controller to replace multiple devices. Accuracy of 0.5%, repeatability of 0.2%, and a control response time of less than 200 milliseconds ensure normal operation of process gas/steam.
III. Technical Parameters
Series ACU20FDH Model LC LM MC MM BC BM Range Gas: 0-(2,5,10...1000) SCCM, 0-(1,5,10...30) SLM Gas: 0-(30,40,50...300) SLM Gas: 0-(300,400,500...3000) SLM Steam: 0-(2,5,10...1000) SCCM, 0-(1,2,3...10) SLM 0-(10,20,30...100) SLM 0-(100,150,200...500) SLM Accuracy 1%F·S Repeatability ±0.2%F·S Zero Drift & Full Scale Drift 0.02% F.S/ ºC/Atm Operating Differential Pressure 0.1~0.5MPa (specified when ordering) Turn Down Ratio 50:1 100:1 50:1 100:1 50:1 100:1 Typical Response Time 200 milliseconds (adjustable) Analog 0～5V、4～20mA Digital RS232/485, MODBUS protocol Power Supply 24VDC Maximum Operating Pressure 1MPa Electrical Connection DB15 pin Protection Level IP40 Leak Rate 1×10-9Pa m³/S Valve Valve Tightly Closed / Valve Tightly Closed / Valve Tightly Closed / Base Material Stainless Steel Sealing Material Viton, Nitrile Rubber, EPDM, Perfluoroether Body Thread G3/8 inner thread G1/2 inner thread Connector Compression fitting, Pagoda, Quick-connect, VCR, Flange, etc. IV. Product Dimensions
Thermal High-Temperature Main Board Base
Thermal High-Temperature Flow Meter Base
V. Optional Matching Monitoring and Control Software (Additional Charge)
Mass Flow Monitoring and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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Address: Room 1522/23, Building B, Ruichuang International Center, No. 8 Wangjingdong Road, Chaoyang District, Beijing (R&D Department)
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