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ACU10P Series

The ACU10P series pressure controllers/pressure gauges feature a straight-through design and cover a measurement range from 100 kPa to 10 MPa (both absolute and gauge pressures are supported). In addition, differential pressure transmitters are also available.

Product Description

  • Product Description
  • I. Product Overview

    The ACU10P series pressure controllers/pressure gauges feature a straight-through design and cover a measurement range from 100 kPa to 10 MPa (both absolute and gauge pressures are supported). In addition, differential pressure transmitters are also available. This series of instruments boasts high accuracy and excellent repeatability, and is available in two configurations: front-pressure control and back-pressure control.

    The ACU10P series comes standard with a piezoelectric diaphragm pressure sensor and a digital circuit board, offering high-precision, stable, and reliable pressure measurement and control. This basic digital PC board features all the essential functions required for measurement and control. In addition to being equipped with a standard RS485 output signal, the ACU10P also provides analog I/O signals.

    (Pressure controller)

    II. Product Applications

    The ACU10P pressure controller can be equipped with either an integrated control valve or a split-type control valve. It is a proportional solenoid-controlled valve characterized by ultra-fast and smooth control performance. We offer various series of control valves tailored to specific application fields. For conventional applications, a standard direct-acting valve is used; for high-flow-rate applications, a pilot-operated valve is recommended. Application areas include: semiconductor processes, gas-phase and liquid-phase chromatographs, vapor-pressure control in MOCVD processes, gas-pressure protection control during extrusion molding, and pressure control in autoclaves/reactors, among others.

    III. Product Parameters

    Series ACU10P
    Model LC LM MC MM BC BM
    Preheating time Negligible
    Accuracy ±1.0% F.S.
    Repetitiveness ≤0.1%
    Working differential pressure 0.05–0.5 MPa (customizable for special requirements)
    Sensor response time 0.2s
    Range ratio 20 to 1 50:1 20 to 1 50:1 20 to 1 50:1
    Typical response time 200 milliseconds (adjustable)
    Analog quantity 0–5V, 4–20mA
    Digital quantity RS232/485, MODBUS protocol
    Power supply 24VDC
    Operating temperature -10~+70℃
    Temperature sensitivity 0.1%FS/℃
    Directional Impact (90° Change) <0.03 kPa (absolute pressure/relative pressure sensor)
    <0.6 kPa (differential pressure sensor)
    Electrical connection DB15 port
    Protection level IP40
    Leak rate 1 × 10⁻⁹ Pa·m³/s
    Valve Valve normally closed / Valve normally closed / Valve normally closed /
    Base material Stainless steel
    Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether
    Body thread G3/8 internal thread G1/2 internal thread
    Joint Card holders, towers, quick-connect fittings, VCRs, flanges, and more

    IV. Product Dimension Diagram

    ACU10P-LC Dimension Drawing

    ACU10P-LM Dimensional Drawing

    ACU10P-MC Dimensional Drawing

    ACU10P-MM Dimensional Drawing

    ACU10P-BC Dimension Drawing

    ACU10P-BM Dimensional Drawing

    ACU10PR-MC Dimension Drawing

    V. Optional Supporting Measurement and Control Software (Additional charges apply)

    Mass Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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