ACU30FC-SC Dimension Drawing
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ACU30FC Series
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Product Description
- Product Description
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I. Product Overview
No error in specific heat capacity; high-precision data with real-time feedback. Compact design for a more intuitive experience on the large screen. Supports multi-parameter measurement, facilitating data analysis. Employs a DSP-based controller to further enhance accuracy and reliability. Allows free switching among nearly a hundred gases without requiring factory calibration. Supports USB Type-C and Bluetooth, enabling flexible and versatile device connectivity.
The ACU30FC series flow meters employ a differential-pressure principle, calculating flow rate based on the pressure difference generated when fluid passes through a throttling element. The product features built-in PID control functionality and, when used in conjunction with an electromagnetic proportional control valve, enables precise flow regulation. The ACU30FC can measure multiple parameters—including mass flow rate, volumetric flow rate, pressure, and temperature—of gases. Through communication interfaces such as RS485/232, a range of these parameters can be displayed on a touch screen or other external devices and control systems, facilitating data monitoring and analysis.
II. Product Applications
Vacuum Coating Solar energy Various instrumental analyses Petroleum and petrochemicals Gas generation and gas distribution Environmental protection Semiconductor III. Product Parameters
Series ACU30FC Model SC SM LC LM MC MM Measurement range 0–(2, 5, 10...1000) SCCM, 0–(1, 5, 10...30) SLM 0-(30,40,50...300) SLM Accuracy ±0.5% F.S. Repetitiveness ±0.2%F.S. Linear ±0.25% F.S. Working differential pressure 0.1–0.5 MPa (specified when ordering) Range ratio 50:1 100:1 50:1 100:1 50:1 100:1 Typical response time 50 milliseconds (adjustable) Analog quantity 0–5V, 4–20mA Digital quantity RS232/485, MODBUS protocol Power supply 24VDC Communication protocol Modbus, DeviceNet, PROFINET, EtherCAT, PROFIBUS, and others Operating temperature 0~60℃ Maximum working pressure 1MPa Electrical connection DB9 hole Installation location Horizontal installation Protection level IP40 Leak rate 1 × 10⁻⁹ Pa·m³/s Valve Valve normally closed / Valve normally closed / Valve normally closed / Base material Stainless steel Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether Body thread G3/8 internal thread Joint Card holders, towers, quick-connect fittings, VCRs, flanges, and more IV. Product Dimension Diagram
5. Optional supporting measurement and control software (additional fees apply)
Mass Flow Measurement and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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