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ACU30FC Series

The ACU30FC is a high-precision differential-pressure flow controller/flow meter featuring a compact footprint and a large display for enhanced convenience and user-friendliness. This series employs a differential-pressure mass-flow measurement principle that exhibits no thermal drift and no response lag, enabling simultaneous display and output of instantaneous flow, cumulative flow, pressure, temperature, and other parameters.

Product Description

  • Product Description
  • I. Product Overview

    No “specific heat capacity” error; high-precision data with real-time feedback.

    Compact design for a more intuitive large-screen experience.

    Supports multi-parameter measurement for convenient data analysis; employs a DSP-based main controller to further enhance accuracy and reliability.

    Switch freely among nearly 100 gases—no need to return the instrument to the factory for calibration.

    Supports USB Type-C and Bluetooth, enabling flexible and versatile device connectivity.

    The ACU30FC series flow meters operate on the differential-pressure principle, calculating flow rate based on the pressure difference generated as the fluid passes through a throttling element. The instrument features built-in PID control functionality and, when paired with an electromagnetic proportional control valve, enables precise flow regulation. The ACU30FC can measure multiple parameters, including gas mass flow, volumetric flow, pressure, and temperature, and transmits these measurements via communication interfaces such as RS485 and RS232 to a touch screen or other external devices and control systems for data monitoring and analysis.

    II. Product Applications

    VacuumCoatingSolar energyVarious instrumental analyses
    Petroleum and PetrochemicalGas production and distributionEnvironmental protectionSemiconductor

    III. Product Specifications

    SeriesACU30FC
    ModelSCSMLCLMMCMiss
    Measurement range0–(2, 5, 10…1000) SCCM, 0–(1, 5, 10…30) SLM0-(30, 40, 50...300) SLM
    Accuracy±0.5% F.S.
    Repeatability±0.2% F.S
    Linear±0.25% F.S
    Working differential pressure0.1–0.5 MPa (to be specified at the time of order)
    Range ratio50:1100 to 150:1100 to 150:1100 to 1
    Typical Response Time50 milliseconds (adjustable)
    Analog quantity0–5 V, 4–20 mA
    Digital quantityRS232/485, MODBUS protocol
    Power supply24VDC
    Communication ProtocolModbus, DeviceNet, Profinet, EtherCAT, Profibus, and others
    Operating temperature0~60℃
    Maximum Working Pressure1MPa
    Electrical ConnectionDB9 port
    Installation LocationHorizontal installation
    Protection LevelIP40
    Leak rate1×10⁻⁹ Pa·m³/s
    ValveValve remains closed/Valve remains closed/Valve remains closed/
    Base materialStainless steel
    Sealing materialFluororubber, nitrile rubber, EPDM, perfluoroether
    Body threadG3/8 internal thread
    JointCompression fittings, ferrules, quick-connects, VCRs, flanges, etc.

    IV. Product Dimension Drawing

    ACU30FC-SC Dimensional Drawing

    ACU30FC-LC Dimensional Drawing

    ACU30FC-MC Dimensional Drawing

    ACU30FCR-BC Dimensional Drawing

    V. Optional Accompanying Measurement and Control Software (additional charge applies)

    Mass Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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