ACU30FC-SC dimension drawing
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ACU30FC
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Product Description
- Product Description
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I. Product Overview
No "specific heat capacity" error, high-precision data real-time feedback Compact design, larger screen for more intuitive experience Supports multi-parameter measurement for easy data analysis Uses DSP main control to further improve accuracy and reliability Nearly 100 kinds of gases can be freely switched without factory recalibration Supports USB Type-C and Bluetooth for flexible and diverse device connections.
The ACU30FC series flow meter adopts a differential pressure principle, calculating flow rate based on the pressure difference generated when fluid passes through a throttling element. The product has a built-in PID adjustment function, and when used with an electromagnetic proportional control valve, it achieves precise flow control. The ACU30FC can measure multiple parameters such as gas mass flow rate, volume flow rate, pressure, and temperature, and display a series of parameters through RS485/232 communication methods via a touch screen or other external devices and control systems for data monitoring and analysis.
II. Product Applications
Vacuum Coating Solar Energy Various instrument analysis Petroleum and petrochemical Gas production and distribution Environmental protection Semiconductor III. Product Parameters
Series ACU30FC Model SC SM LC LM MC MM Measurement Range 0-(2,5,10...1000) SCCM, 0-(1,5,10...30) SLM 0-(30,40,50...300) SLM Accuracy ±0.5%F.S Repeatability ±0.2%F.S Linearity ±0.25%F.S Operating Differential Pressure 0.1~0.5MPa (specified when ordering) Measurement Ratio 50:1 100:1 50:1 100:1 50:1 100:1 Typical Response Time 50 milliseconds (adjustable) Analog Signal 0~5V、4~20mA Digital Signal RS232/485,MODBUS protocol Power Supply 24VDC Communication Protocol Modbus、DeviceNet、profinet、EtherCAT、profibus, etc. Operating Temperature 0~60℃ Maximum Operating Pressure 1MPa Electrical Connection DB9 pin Installation Position Horizontal installation Protection Level IP40 Leakage Rate 1×10-9Pa m³/S Valve Valve tightly closed / Valve tightly closed / Valve tightly closed / Base Material Stainless steel Sealing Material Viton, nitrile rubber, EPDM, perfluoroether Body Thread G3/8 inner thread Connector Compression fitting, pagoda, quick-connect, VCR, flange, etc. IV. Product Dimension Drawings
V. Optional Matching Monitoring and Control Software (additional charges apply)
Mass flow monitoring and control system V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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