ACU30FC-SC Dimensional Drawing
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ACU30FC Series
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Product Description
- Product Description
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I. Product Overview
◆ No “specific heat capacity” error; high-precision data with real-time feedback.
◆ Compact design for a more intuitive large-screen experience.
◆ Supports multi-parameter measurement for convenient data analysis; employs a DSP-based main controller to further enhance accuracy and reliability.
◆ Switch freely among nearly 100 gases—no need to return the instrument to the factory for calibration.
◆ Supports USB Type-C and Bluetooth, enabling flexible and versatile device connectivity.
The ACU30FC series flow meters operate on the differential-pressure principle, calculating flow rate based on the pressure difference generated as the fluid passes through a throttling element. The instrument features built-in PID control functionality and, when paired with an electromagnetic proportional control valve, enables precise flow regulation. The ACU30FC can measure multiple parameters, including gas mass flow, volumetric flow, pressure, and temperature, and transmits these measurements via communication interfaces such as RS485 and RS232 to a touch screen or other external devices and control systems for data monitoring and analysis.
II. Product Applications
Vacuum Coating Solar energy Various instrumental analyses Petroleum and Petrochemical Gas production and distribution Environmental protection Semiconductor III. Product Specifications
Series ACU30FC Model SC SM LC LM MC Miss Measurement range 0–(2, 5, 10…1000) SCCM, 0–(1, 5, 10…30) SLM 0-(30, 40, 50...300) SLM Accuracy ±0.5% F.S. Repeatability ±0.2% F.S Linear ±0.25% F.S Working differential pressure 0.1–0.5 MPa (to be specified at the time of order) Range ratio 50:1 100 to 1 50:1 100 to 1 50:1 100 to 1 Typical Response Time 50 milliseconds (adjustable) Analog quantity 0–5 V, 4–20 mA Digital quantity RS232/485, MODBUS protocol Power supply 24VDC Communication Protocol Modbus, DeviceNet, Profinet, EtherCAT, Profibus, and others Operating temperature 0~60℃ Maximum Working Pressure 1MPa Electrical Connection DB9 port Installation Location Horizontal installation Protection Level IP40 Leak rate 1×10⁻⁹ Pa·m³/s Valve Valve remains closed / Valve remains closed / Valve remains closed / Base material Stainless steel Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether Body thread G3/8 internal thread Joint Compression fittings, ferrules, quick-connects, VCRs, flanges, etc. IV. Product Dimension Drawing
V. Optional Accompanying Measurement and Control Software (additional charge applies)
Mass Flow Measurement and Control System V5.0
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Semiconductor and Microelectronics Manufacturing
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