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ACU30FC Series

The ACU30FC is a high-precision differential-pressure flow controller/flowmeter series. It features a compact design yet boasts a large screen, making it even more convenient and user-friendly. This series of products employs a differential-pressure mass measurement principle that is free from thermal drift and response lag, and can simultaneously display and output parameters such as instantaneous flow rate, totalized flow, pressure, and temperature.

Product Description

  • Product Description
  • I. Product Overview

    No error in specific heat capacity; high-precision data with real-time feedback. Compact design for a more intuitive experience on the large screen. Supports multi-parameter measurement, facilitating data analysis. Employs a DSP-based controller to further enhance accuracy and reliability. Allows free switching among nearly a hundred gases without requiring factory calibration. Supports USB Type-C and Bluetooth, enabling flexible and versatile device connectivity.

    The ACU30FC series flow meters employ a differential-pressure principle, calculating flow rate based on the pressure difference generated when fluid passes through a throttling element. The product features built-in PID control functionality and, when used in conjunction with an electromagnetic proportional control valve, enables precise flow regulation. The ACU30FC can measure multiple parameters—including mass flow rate, volumetric flow rate, pressure, and temperature—of gases. Through communication interfaces such as RS485/232, a range of these parameters can be displayed on a touch screen or other external devices and control systems, facilitating data monitoring and analysis.

    II. Product Applications

    Vacuum Coating Solar energy Various instrumental analyses
    Petroleum and petrochemicals Gas generation and gas distribution Environmental protection Semiconductor

    III. Product Parameters

    Series ACU30FC
    Model SC SM LC LM MC MM
    Measurement range 0–(2, 5, 10...1000) SCCM, 0–(1, 5, 10...30) SLM 0-(30,40,50...300) SLM
    Accuracy ±0.5% F.S.
    Repetitiveness ±0.2%F.S.
    Linear ±0.25% F.S.
    Working differential pressure 0.1–0.5 MPa (specified when ordering)
    Range ratio 50:1 100:1 50:1 100:1 50:1 100:1
    Typical response time 50 milliseconds (adjustable)
    Analog quantity 0–5V, 4–20mA
    Digital quantity RS232/485, MODBUS protocol
    Power supply 24VDC
    Communication protocol Modbus, DeviceNet, PROFINET, EtherCAT, PROFIBUS, and others
    Operating temperature 0~60℃
    Maximum working pressure 1MPa
    Electrical connection DB9 hole
    Installation location Horizontal installation
    Protection level IP40
    Leak rate 1 × 10⁻⁹ Pa·m³/s
    Valve Valve normally closed / Valve normally closed / Valve normally closed /
    Base material Stainless steel
    Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether
    Body thread G3/8 internal thread
    Joint Card holders, towers, quick-connect fittings, VCRs, flanges, and more

    IV. Product Dimension Diagram

    ACU30FC-SC Dimension Drawing

    ACU30FC-LC Dimension Drawing

    ACU30FC-MC Dimensional Drawing

    ACU30FCR-BC Dimension Drawing

    5. Optional supporting measurement and control software (additional fees apply)

    Mass Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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