Gas Flow Meters and  Flow Controllers

Gas Flow Meters and Flow Controllers


A gas mass flow controller consists of components such as a mass flow sensor, a laminar flow element, a flow controller regulating valve, and an amplification and control circuit. It uses the principle of calorimetry based on the temperature difference before and after capillary heat transfer to measure the mass flow rate of gas, unaffected by temperature and pressure. The flow signal measured by the sensor is amplified and then compared with the set voltage. The resulting difference is used to drive the control regulating valve, closing the loop to control the flow rate through the channel to match the set flow rate. Accuracies of ±1% and ±0.5% are available, with a wide flow range, sufficient to meet the needs of most customers. It can be used in laboratories for various experiments and in complex industrial environments.