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ACU10FCH Series

The ACU10FCH series high-temperature mass flow meters enable rapid and accurate measurement of volumetric flow rate and mass flow rate for process gases, liquids, and steam. The ACU10HCH series high-temperature mass flow controllers utilize custom-designed high-speed proportional control valves to achieve precise control of the volumetric flow rate and mass flow rate for gases, liquids, and steam.

Product Description

  • Product Description
  • I. Product Overview

    ◆ Can quickly and accurately measure the volumetric flow rate/mass flow rate of process gases/liquids/vapors.

    ◆ A custom-designed high-speed proportional control valve is used to precisely regulate the volumetric flow rate/mass flow rate of the medium.

    ◆ When measuring liquids, the uniquely designed vent hole allows air to be easily expelled.

    ◆ Integrated multi-function digital display screen allows users to control setpoints and PID valve adjustments simply by operating the screen buttons, while also providing analog input/output and RS-485 digital communication interfaces.

    ◆ No internal movable components or heating elements; passed vibration resistance testing and is insensitive to installation orientation.

    ◆ Utilizing internally compensated laminar flow differential pressure technology, the fluid maintains laminar flow even over a wide flow range.

    ◆Provides comprehensive user support, including technical consultation, quick equipment calibration services, and a conditional lifetime warranty.

    II. Product Applications

    The ACU10FCH series high-temperature mass flow meters/controllers are widely used in various industries, including process manufacturing, food analysis, analytical testing, and metrology.

    Multi-variable measurement and a 50:1 adjustable range enable a single ACU10FCH high-temperature mass flow meter/controller to replace the functionality of multiple devices. With an accuracy of 1%, repeatability of 1%, and a control response time of less than 200 milliseconds, this instrument ensures the reliable operation of process gases, liquids, and vapors.

    III. Technical Parameters

    Series ACU10FCH
    Model LC LM MC MM BC BM
    Measurement range Gas: 0–(2, 5, 10...1000) SCCM, 0–(1, 5, 10...30) SLM Gas: 0–(30, 40, 50...300) SLM Gas: 0–(300, 400, 500...3000) SLM
    Liquid: 0–(2, 5, 10...500) SCCM Liquid: 0–(500, 600…1000) SCCM, 0–(1, 2, 3…10) SLM Liquid: 0-(1, 2, 3...10) SLM
    Steam: 0–(2, 5, 10...1000) SCCM, 0–(1, 2, 3...10) SLM 0-(10,20,30...100)SLM 0-(100, 150, 200...500) SLM
    Accuracy ±1.0% F.S.
    Repetitiveness ±1% F.S.
    Zero-point drift & Full-scale drift 0.02% F.S./°C/Atm
    Working differential pressure 0.1–0.5 MPa (specified when ordering)
    Range ratio 50:1 100:1 50:1 100:1 50:1 100:1
    Typical response time 200 milliseconds (adjustable)
    Analog quantity 0–5V, 4–20mA
    Digital quantity RS232/485, MODBUS protocol
    Power supply 24VDC
    Operating temperature +10~+50℃
    Work pressure drop <0.01 MPa
    Work pressure <1 MPa
    Electrical connection DB15 port
    Protection level IP40
    Leak rate 1 × 10⁻⁹ Pa·m³/s
    Valve Valve normally closed / Valve normally closed / Valve normally closed /
    Base material Stainless steel
    Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether
    Body thread G3/8 internal thread G1/2 internal thread
    Joint Card holders, towers, quick-connect fittings, VCRs, flanges, and more

    IV. Product Dimension Diagram

    ACU10FCH-LC Integrated Dimension Drawing

    Split Dimension Diagram for ACU10FCH-LC

    Integrated Dimension Drawing for ACU10FCH-LM

    Split Unit Dimension Diagram for ACU10FCH-LM

    ACU10FCH-MC Integrated Dimension Drawing

    Split Unit Dimension Diagram for ACU10FCH-MC

    ACU10FCH-MM Integrated Dimension Drawing

    Split Unit Dimension Diagram ACU10FCH-MM

    Split Dimension Diagram for ACU10FCH-BC

    V. High-Temperature Steam Flow Controller

    When the measured medium and flow rate differ, the product’s appearance and dimensions may vary. For example, the high-temperature steam flow controller with a medium range shown in the figure below—please consult us based on your actual operating conditions.

    dcd3a847-58ee-4aca-b618-40b5e5c5f4c8

    (High-Temperature Steam Flow Controller)

    6. Optional supporting measurement and control software (additional charges apply)

    Mass Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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