ACU10FA-LC Dimension Drawing
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ACU10FA
The ACU10FA analog-type mass flow controller features fast response and high precision. It offers a wide control range, with a flow rate capability spanning from 5 SCCM to 30 SLM, and can accurately measure and regulate flows as low as 1 SCCM—making it ideal for controlling even the tiniest gas flows.
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Product Description
- Product Description
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I. Product Overview
◆ Thermal principle, fast response, high accuracy
◆ Tubular shunt, resistant to clogging
◆ Suitable for various low-pressure and high-pressure pipelines
◆Short warm-up time, minimal zero drift, and high reliability
◆ Analog input/output can be used with secondary instruments or flow computers to control and display flow rates.
The ACU10FA mass flow controller consists of components such as a mass flow sensor, laminar flow separator, flow control regulating valve, and an amplification control circuit. It operates based on the thermal conduction distribution effect, where heat transferred by the flowing fluid alters the temperature distribution along the walls of the measurement capillary tube.
The ACU10FA measures the mass flow rate of gases using the principle of capillary heat transfer and differential temperature calorimetry, ensuring accuracy regardless of temperature or pressure variations. The flow signal detected by the sensor is first amplified, then compared with a preset voltage. The resulting difference is used to precisely control and adjust the regulating valve, maintaining a closed-loop system that ensures the flow through the channel matches the setpoint value.
II. Product Applications
Glass industry Solar energy Atmospheric Monitoring Industrial production Petroleum and Petrochemicals Coal Metallurgy Gas Generation and Gas Distribution Environmental protection Various instrumental analyses 3. Product Specifications
Series ACU10FA Model LC LM MC MM Measurement range 0–(2, 5, 10…1000) SCCM, 0–(1, 5, 10…30) SLM 0 - (30, 40, 50...300) SLM Accuracy ±1.0% of F.S. Temperature: ±1℃ Linear ±0.5% of F.S. Repeatability precision ±0.2%F.S Response time <2s Analog quantity 0–5V, 4–20mA Power supply ±15VDC, 24VDC Operating temperature 0–50°C Work pressure difference 0.05–0.5 MPa (specified upon order) Maximum withstand voltage 3MPa/10MPa Electrical connection DB9 port Leak rate 1 × 10⁻⁹ Pa·m³/s Temperature coefficient ±0.015%F.S./°C Base material Stainless steel Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether Connector φ3, φ6, 1/8", 1/4" 4. Product Dimension Drawing
ACU10FA-LM Mass Flow Meter
ACU10FA-MC Dimension Drawing
ACU10FA-MM Dimension Drawing
V. Supporting Equipment (Sold Separately)
The ACU10FA-XS flow indicator provides operating power for analog mass flow meters, as well as functions such as flow setting (controlled via manual operation) and flow display.
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Semiconductor and Microelectronics Manufacturing
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