ACU10FA Series

The ACU10FA analog mass flow controller features fast response and high accuracy. It offers a wide control range, spanning from 5 SCCM to 30 SLM, and can measure and regulate flow rates as low as 1 SCCM, making it suitable for controlling very small flow rates.

Category:

Gas Flow Meters and Flow Controllers

Product attachment:

ACU10FA模拟型质量流量控制器.pdf

Get a quote

I. Product Overview

◆ Thermal principle, fast response, high accuracy

◆ Tubular shunt, less prone to blockage

◆ Suitable for various low-pressure and high-pressure pipelines

◆ Short warm-up time, minimal zero drift, and high reliability

◆ Analog inputs/outputs can use secondary instruments or flow computers to control and display flow rates.

The ACU10FA mass flow controller consists of a mass flow sensor, a laminar flow element, a flow‑control regulating valve, and an amplification control circuit. It operates on the principle of heat conduction, which alters the temperature distribution along the wall of a measuring capillary as the flowing fluid transfers heat.

The ACU10FA measures gas mass flow using the capillary‑based differential‑temperature calorimetric principle, which is unaffected by temperature and pressure. The flow signal detected by the sensor is amplified and compared with a setpoint voltage; the resulting error signal drives a control valve, enabling closed‑loop regulation of the flow through the channel to match the desired setpoint.

II. Product Applications

Glass industry	Solar energy	Atmospheric monitoring	Industrial manufacturing	Petroleum and Petrochemicals
Coal Metallurgy	Gas production and gas distribution	Environmental protection	Various instrumental analyses

III. Product Specifications

Series	ACU10FA
Model number	LC	LM	MC	MM
Measurement range	0–(2, 5, 10…1000) SCCM, 0–(1, 5, 10…30) SLM		0-（30,40,50...300)SLM
Accuracy	±1.0%F.S
	Temperature: ±1℃
Linear	±0.5%F.S
Repeatability	±0.2%F.S
Response time	<2s
Analog quantity	0–5 V, 4–20 mA
Power supply	±15 VDC, 24 VDC
Operating temperature	0–50°C
Working pressure differential	0.05–0.5 MPa (to be specified at the time of order)
Maximum withstand voltage	3MPa/10MPa
Electrical connection	DB9 port
Leak rate	1×10-9 Pa·m³/s
Temperature coefficient	±0.015%F.S/℃
Base material	Stainless steel
Sealing material	Fluororubber, nitrile rubber, EPDM, perfluoroether
Joint	φ3, φ6, 1/8", 1/4"

IV. Product Dimension Diagram

V. Ancillary Equipment (to be purchased separately)

The ACU10FA-XS flow display unit can supply power to analog mass flow meters, enable manual flow setpoint adjustment, and provide flow rate display, among other functions.

Keyword:

Semiconductor and Microelectronics Manufacturing

Get a quote

Note: Please leave your mobile phone number or email address, and our professionals will contact you as soon as possible!