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ACU10FA

The ACU10FA analog mass flow controller boasts fast response and high accuracy. It offers a wide control range, spanning 5 SCCM to 30 SLM, with the ability to measure and regulate flow as low as 1 SCCM, making it suitable for controlling very small flow rates.

Product Description

  • Product Description
  • I. Product Overview

    ◆Thermal principle, fast response, high accuracy

    ◆Tubular shunt, not easy to block

    ◆Suitable for various low-pressure and high-pressure pipelines

    ◆Short preheating time, small zero drift, high reliability

    ◆Analog input/output can be used to control and display flow rate with a secondary instrument or flow computer

    The ACU10FA mass flow controller consists of components such as a mass flow sensor, a laminar flow element, a flow controller regulating valve, and an amplification and control circuit. It is made using the thermal conductivity distribution effect that changes the temperature distribution of the measuring capillary wall by the heat transfer of the flowing fluid.

    The ACU10FA uses the principle of calorimetry of the temperature difference before and after capillary heat transfer to measure the mass flow rate of gas, which is not affected by temperature and pressure. The flow signal measured by the sensor is amplified and then compared with the set voltage. The resulting difference is used to drive the control regulating valve, and the flow rate through the channel is closed-loop controlled to be equal to the set flow rate.

    II. Product Applications

    Glass industrySolar energyAtmospheric monitoringIndustrial manufacturingPetroleum and petrochemical
    Coal and metallurgyGas production and distributionEnvironmental protectionVarious instrument analysis

    III. Product Parameters

    SeriesACU10FA
    ModelLCLMMCMM
    Measurement Range0-(2,5,10...1000) SCCM, 0-(1,5,10...30) SLM0-(30,40,50...300) SLM
    Accuracy±1.0%F.S
    Temperature: ±1℃
    Linearity±0.5%F.S
    Repeatability±0.2%F.S
    Response Time<2s
    Analog0~5V、4~20mA
    Power Supply±15VDC,24VDC
    Operating Temperature0~50℃
    Operating Pressure Difference0.05~0.5Mpa (specified when ordering)
    Maximum Withstand Pressure3MPa/10MPa
    Electrical ConnectionDB9 hole
    Leakage Rate1×10-9Pa m³/S
    Temperature Coefficient±0.015%F.S/℃
    Base MaterialStainless steel
    Sealing MaterialViton, nitrile rubber, EPDM, perfluoroether
    Connectorφ3,φ6,1/8",1/4"

    IV. Product Dimensions

    ACU10FA-LC Dimensions

    ACU10FA-LM Mass Flow Meter

    ACU10FA-MC Dimensions

    ACU10FA-MM Dimensions

     

    V. Supporting Equipment (needs to be purchased separately)

    The ACU10FA-XS flow display instrument can provide operating power, flow setting (manual control), and flow display for analog mass flow meters.

Keyword:

Semiconductor and Microelectronics Manufacturing

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