ACU20P-LC Dimensional Drawing
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ACU20P Series
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Product Description
- Product Description
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I. Product Overview
The ACU20P series pressure controllers and pressure gauges feature a straight-through design, with a measurement range from 100 kPa to 10 MPa (available for both absolute and gauge pressure). Differential pressure transmitters are also offered. This series of instruments boasts high accuracy and excellent repeatability, and is available in two configurations: forward-pressure control and back-pressure control.
The ACU20P series comes standard with a pressure sensor and a digital circuit board, delivering high-precision, fast-responding, and reliable pressure control. The PC-based digital board incorporates all the functions required for precise pressure regulation. In addition to the standard RS485 output signal, the ACU20P also features analog input and output interfaces, enabling accurate control of the entire process simply by adjusting the setpoint. The ACU20P series pressure controllers can be equipped with either an integrated or a split-type control valve. This is a proportional solenoid-controlled valve that offers ultra-fast response and smooth, stable control.
II. Product Applications
Application areas: semiconductor manufacturing processes, gas-phase and liquid-phase chromatography, vapor-pressure control in MOCVD processes, gas-pressure protection control in extrusion molding, and pressure control in autoclaves/reactors, among others.
III. Product Specifications
Series ACU20P Model LC LM MC Miss British Columbia BM Preheating time Negligible Accuracy ±0.5% F.S Repeatability ≤0.1% Working differential pressure 0.05–0.5 MPa (customizable upon request) Sensor response time 0.2s Range ratio 20:1 50 to 1 20:1 50 to 1 20:1 50 to 1 Control stability ≤±0.05% F.S (measurement conditions: 1 L/min N2) Analog quantity 0–5 V, 4–20 mA Digital quantity RS232/485, MODBUS protocol Power supply 24VDC Operating temperature -10~+70℃ Temperature sensitivity 0.1%FS/°C Directional Influence Degree (90° Change) <0.03 kPa (absolute pressure / gauge pressure sensor) <0.6 kPa (differential pressure sensor) Electrical Connection DB9 pin Protection rating IP40 Leak rate 1×10⁻⁹ Pa·m³/s Valve Valve normally closed / Valve normally closed / Valve normally closed / Base material Stainless steel Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether Body thread G3/8 internal thread G1/2 internal thread Joint Ferrules, ferrules with a tower-shaped design, quick-connect fittings, VCR fittings, flanges, and more IV. Product Dimension Drawing
V. Optional Accompanying Measurement and Control Software (Additional charges apply)
Mass Flow Measurement and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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