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ACU20P Series

The ACU20P series pressure controllers are equipped with high-performance sensors and a digital circuit board, delivering superior precision and performance in pressure control. By simply adjusting the setpoint, the entire process can be precisely controlled. In addition to the standard Modbus protocol, these controllers also support the Profibus protocol.

Product Description

  • Product Description
  • I. Product Overview

    The ACU20P series pressure controllers and pressure gauges feature a straight-through design, with a measurement range from 100 kPa to 10 MPa—suitable for both absolute and gauge pressure applications. Differential pressure transmitters are also available. This series of instruments offers high accuracy and excellent repeatability, and is available in two configurations: forward-pressure control and back-pressure control.

    The ACU20P series comes standard with a pressure sensor and a digital circuit board, delivering high-precision, fast-stabilizing, and reliable pressure control; the PC-based digital board incorporates all functions required for pressure regulation. In addition to the standard RS485 output signal, the ACU20P also features analog input/output signals, enabling precise control of the entire process simply by adjusting the setpoint. The ACU20P series pressure controllers can be equipped with either an integral or a split-type control valve. This is a proportional solenoid-controlled valve that offers ultra-fast response and smooth, stable control.

    II. Product Applications

    Application areas: semiconductor manufacturing processes, gas-phase and liquid-phase chromatography, vapor-pressure control in MOCVD processes, gas-pressure protection control in extrusion molding, and pressure control in autoclaves/reactors, among others.

    III. Product Specifications

    Series ACU20P
    Model LC LM MC MM BC BM
    Preheating time Negligible
    Accuracy ±0.5% F.S.
    Repeatability ≤0.1%
    Working differential pressure 0.05–0.5 MPa (customizable upon request)
    Sensor response time 0.2s
    Range ratio 20:1 50:1 20:1 50:1 20:1 50:1
    Control Stability ≤±0.05% F.S (measurement conditions: 1 L/min N2)
    Analog quantity 0–5 V, 4–20 mA
    Digital quantity RS232/485, MODBUS protocol
    Power supply 24VDC
    Operating temperature -10~+70℃
    Temperature sensitivity 0.1%FS/°C
    Directional Influence Degree (90° Change) <0.03 kPa (absolute/gauge pressure sensor)
    <0.6 kPa (differential pressure sensor)
    Electrical Connection DB9 port
    Protection Level IP40
    Leak rate 1×10⁻⁹ Pa·m³/s
    Valve Valve normally closed / Valve normally closed / Valve normally closed /
    Base Material Stainless steel
    Sealing material Fluororubber, nitrile rubber, ethylene propylene diene monomer rubber, perfluoroether
    Body thread G3/8 internal thread G1/2 internal thread
    Joint Compression fittings, ferrules, quick-connects, VCR fittings, flanges, etc.

    IV. Product Dimension Drawing

    ACU20P-LC Dimensional Drawing

    ACU20P-LM Dimensional Drawing

    ACU20P-MC Dimensional Drawing

    ACU20P-MM Dimensional Drawing

    ACU20P-BC Dimensional Drawing

    ACU20P-BM Dimensional Drawing

    ACU20PR-MC Dimensional Drawing

    V. Optional Accompanying Measurement and Control Software (Additional charges apply)

    Mass Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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