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Product Description
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I. Product Overview
The ACU20PCD dual-valve pressure controller integrates two solenoid valves. The inlet valve introduces process gas into the chamber, maintaining the pressure in the sealed space. When the pressure is too high, the pressure relief valve automatically opens to relieve pressure, quickly and accurately controlling pressure stability while avoiding gas waste.
The ACU20PCD comes standard with a pressure sensor and a digital circuit board, providing high-precision, fast, stable, and reliable pressure control. This PC digital board has all the functions required for pressure control. In addition to the standard RS485 output signal, the ACU20PCD also provides analog input/output signals, allowing precise control of the entire process by adjusting the setpoint. The touch screen makes operation more convenient. The ACU20PCD dual-valve pressure controller can be equipped with an integrated control valve or a separate control valve. It is a proportional electromagnetic control valve with ultra-fast and smooth control characteristics. We have different series of control valves for specific applications. Standard direct-acting valves are used for conventional applications, pilot valves for high-flow applications, and dual valves for pressure stabilization and relief.
II. Product Applications
Application fields: Semiconductor production, scientific research, biomedicine, energy and chemical industry, leak testing, fuel cells, vacuum coating, and process control, etc.
III. Product Parameters
Technical Parameters Accuracy (including linearity and hysteresis) ±0.5%F.S Pressure Controller 1:50 Repeatability ≤0.1% Sensor Response Time 0.2s Control Stability ≤±0.05%F.S (Test conditions: 1 L/min N2) Operating Temperature -10~+70℃ Temperature Sensitivity 0.1%FS/℃ Leak Rate 1×10-9 SCCS He Orientation Influence (90° change) ＜0.03 KPa (Absolute/Gauge pressure sensor) ＜0.6 KPa (Differential pressure sensor) Warm-up Time Negligible Mechanical Components Material Stainless Steel Process Connection G3/8" Sealing Material Viton/Nitrile rubber/Chloroprene rubber/Others Protection Level (Enclosure) IP40 Electrical Characteristics Power Supply 15~24Vdc Communication Protocol Profinet Protocol Electrical Connection DB9 IV. Optional Matching Monitoring and Control Software (Additional Charge Applies)
Mass Flow Monitoring and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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