ACU20FC-LC Dimension Drawing
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ACU20FC Series
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Product Description
- Product Description
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I. Product Overview
◆ No thermal drift, negligible temperature and time drift, with long-term stability of 0.1% F.S./year.
◆ Accuracy: 0.5%; measurement range can be set via buttons within a 100:1 span—no calibration required.
◆ Instantaneous and cumulative flow, pressure, and temperature can be displayed simultaneously.
◆ No preheating required; no response lag during measurement.
◆ Built-in 30 gas conversion factors; no additional error due to specific heat capacity, ensuring no impact on accuracy.
The ACU20FC differential-pressure mass flow controller employs a differential-pressure mass measurement principle that features zero thermal drift and no response lag. It can simultaneously display and output parameters such as instantaneous flow rate, cumulative flow rate, pressure, and temperature. When control functionality is required, an electromagnetic proportional control valve and built-in PID regulation capabilities can also be added. Unlike thermal mass flow meters, the ACU20FC differential-pressure mass flow controller does not introduce additional “specific heat capacity” errors when using gas conversion factors. Therefore, even if the gas being measured differs from the calibration gas used at the factory, measurement accuracy remains unaffected.
II. Product Applications
The ACU20FC series differential-pressure mass flow controllers are widely used across various industries, including process manufacturing, food analysis, analytical testing, and metrology. Thanks to their multi-variable measurement capabilities and a 50:1 adjustable range, a single ACU20FC differential-pressure mass flow controller can replace the functionality of multiple devices. With an accuracy of 0.5%, repeatability of 0.2%, and a control response time of less than 200 milliseconds, these controllers ensure reliable operation of process gases.
III. Product Parameters
Series ACU20FC Model LC LM MC MM BC BM Measurement range 0–(2, 5, 10...1000) SCCM, 0–(1, 5, 10...30) SLM 0-(30,40,50...300) SLM 0-(300,400,500...3000) SLM Accuracy ±0.5% F.S. Repetitiveness ±0.2%F.S. Linear ±0.25% of F.S. Working differential pressure 0.1–0.5 MPa (specify when placing an order) Range ratio 50:1 100:1 50:1 100:1 50:1 100:1 Typical response time 200 milliseconds (adjustable) Analog quantity 0–5V, 4–20mA Digital quantity RS232/485, MODBUS protocol Power supply 24VDC Communication protocol Modbus, DeviceNet, PROFINET, EtherCAT, PROFIBUS, and others Operating temperature +10~+50℃ Work pressure drop <0.01 MPa Maximum working pressure 1MPa Electrical connection DB9 hole Protection level IP40 Leak rate 1 × 10⁻⁹ Pa·m³/s Valve Valve normally closed / Valve normally closed / Valve normally closed / Base material Stainless steel Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether Body thread G3/8 internal thread G1/2 internal thread Joint Card holders, towers, quick-connect fittings, VCRs, flanges, and more IV. Product Dimension Diagram
V. Optional Supporting Measurement and Control Software (Additional charges apply)
Mass Flow Measurement and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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