ACU20FC-LC Dimensions
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ACU20FC
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Product Description
- Product Description
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I. Product Overview
◆No thermal drift, negligible temperature drift and time drift, long-term stability 0.1%F.S/year
◆Accuracy 0.5%, range can be set by key within 100:1, no calibration needed
◆Instantaneous and cumulative flow, pressure, and temperature can be displayed simultaneously
◆No preheating required, no response lag during measurement
◆Built-in 30 kinds of gas conversion coefficients, no specific heat capacity additional error, does not affect accuracy
The ACU20FC differential pressure mass flow controller adopts the principle of differential pressure mass measurement without thermal drift and response lag, and can simultaneously display and output: instantaneous flow, cumulative flow, pressure, temperature, etc. When control function is needed, an electromagnetic proportional control valve and built-in PID control function can also be added. Unlike thermal flow meters, when using gas conversion coefficients, the ACU20FC differential pressure mass flow controller has no additional "specific heat capacity" error. Therefore, even if the measured gas is different from the calibrated gas at the factory, it will not affect the measurement accuracy.
II. Product Applications
The ACU20FC series differential pressure mass flow controllers are widely used in various industries, such as: process manufacturing, food analysis, analytical testing and measurement, etc. Multi-variable measurement and 50:1 adjustable range ratio make it possible to replace multiple devices with only one ACU20FC differential pressure mass flow controller. Accuracy of 0.5%, repeatability of 0.2%, and a control response time of less than 200 milliseconds ensure the normal operation of the process gas.
III. Product Parameters
Series ACU20FC Model LC LM MC MM BC BM Range 0-(2,5,10...1000)SCCM, 0-(1,5,10...30)SLM 0-(30,40,50...300)SLM 0-(300,400,500...3000)SLM Accuracy ±0.5%F.S Repeatability ±0.2%F.S Linearity ±0.25%F.S Working Differential Pressure 0.1~0.5MPa (specified when ordering) Range Ratio 50:1 100:1 50:1 100:1 50:1 100:1 Typical Response Time 200 milliseconds (adjustable) Analog 0~5V、4~20mA Digital RS232/485,MODBUS protocol Power Supply 24VDC Communication Protocol Modbus、DeviceNet、profinet、ErtherCAT、profibus, etc. Operating Temperature +10~+50℃ Working Pressure Drop <0.01Mpa Maximum Operating Pressure 1MPa Electrical Connection DB9 pin Protection Level IP40 Leakage Rate 1×10-9Pa m³/S Valve Valve Tightly Closed / Valve Tightly Closed / Valve Tightly Closed / Base Material Stainless Steel Sealing Material Viton, Nitrile Rubber, EPDM, Perfluoroether Body Thread G3/8 inner thread G1/2 inner thread Connector Compression fitting, Pagoda, Quick plug, VCR, Flange, etc. IV. Product Dimensions
V. Optional Matching Monitoring and Control Software (Additional charges apply)
Mass Flow Monitoring and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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