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ACU20FC

The ACU20FC is a high-precision differential pressure flow controller/flow meter. This series of products uses a differential pressure measurement principle without thermal drift or response lag, and can simultaneously display and output: instantaneous flow rate, cumulative flow rate, pressure, and temperature. When control functionality is required, an electromagnetic proportional valve and built-in PID control function can be added.

Product attachment:

Product Description

  • Product Description
  • I. Product Overview

    ◆No thermal drift, negligible temperature drift and time drift, long-term stability 0.1%F.S/year

    ◆Accuracy 0.5%, range can be set by key within 100:1, no calibration needed

    ◆Instantaneous and cumulative flow, pressure, and temperature can be displayed simultaneously

    ◆No preheating required, no response lag during measurement

    ◆Built-in 30 kinds of gas conversion coefficients, no specific heat capacity additional error, does not affect accuracy

    The ACU20FC differential pressure mass flow controller adopts the principle of differential pressure mass measurement without thermal drift and response lag, and can simultaneously display and output: instantaneous flow, cumulative flow, pressure, temperature, etc. When control function is needed, an electromagnetic proportional control valve and built-in PID control function can also be added. Unlike thermal flow meters, when using gas conversion coefficients, the ACU20FC differential pressure mass flow controller has no additional "specific heat capacity" error. Therefore, even if the measured gas is different from the calibrated gas at the factory, it will not affect the measurement accuracy.

    II. Product Applications

    The ACU20FC series differential pressure mass flow controllers are widely used in various industries, such as: process manufacturing, food analysis, analytical testing and measurement, etc. Multi-variable measurement and 50:1 adjustable range ratio make it possible to replace multiple devices with only one ACU20FC differential pressure mass flow controller. Accuracy of 0.5%, repeatability of 0.2%, and a control response time of less than 200 milliseconds ensure the normal operation of the process gas.

    III. Product Parameters

    SeriesACU20FC
    ModelLCLMMCMMBCBM
    Range0-(2,5,10...1000)SCCM, 0-(1,5,10...30)SLM0-(30,40,50...300)SLM0-(300,400,500...3000)SLM
    Accuracy±0.5%F.S
    Repeatability±0.2%F.S
    Linearity±0.25%F.S
    Working Differential Pressure0.1~0.5MPa (specified when ordering)
    Range Ratio50:1100:150:1100:150:1100:1
    Typical Response Time200 milliseconds (adjustable)
    Analog0~5V、4~20mA
    DigitalRS232/485,MODBUS protocol
    Power Supply24VDC
    Communication ProtocolModbus、DeviceNet、profinet、ErtherCAT、profibus, etc.
    Operating Temperature+10~+50℃
    Working Pressure Drop<0.01Mpa
    Maximum Operating Pressure1MPa
    Electrical ConnectionDB9 pin
    Protection LevelIP40
    Leakage Rate1×10-9Pa m³/S
    ValveValve Tightly Closed/Valve Tightly Closed/Valve Tightly Closed/
    Base MaterialStainless Steel
    Sealing MaterialViton, Nitrile Rubber, EPDM, Perfluoroether
    Body ThreadG3/8 inner threadG1/2 inner thread
    ConnectorCompression fitting, Pagoda, Quick plug, VCR, Flange, etc.

    IV. Product Dimensions

    ACU20FC-LC Dimensions

    ACU20FC-LM Dimensions

    ACU20FC-MC Dimensions

    ACU20FC-MM Dimensions

    ACU20FC-BC Dimensions

    ACU20FC-BM Dimensions

    V. Optional Matching Monitoring and Control Software (Additional charges apply)

    Mass Flow Monitoring and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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