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ACU20FC Series

The ACU20FC is a high-precision differential-pressure flow controller/flowmeter series. This product series employs a differential-pressure mass measurement principle that features no thermal drift and no response lag, and can simultaneously display and output parameters such as instantaneous flow rate, cumulative flow rate, pressure, and temperature. When control functionality is required, an electromagnetic proportional control valve and built-in PID regulation function can also be added.

Product attachment:

Product Description

  • Product Description
  • I. Product Overview

    ◆ No thermal drift, negligible temperature and time drift, with long-term stability of 0.1% F.S./year.

    ◆ Accuracy: 0.5%; measurement range can be set via buttons within a 100:1 span—no calibration required.

    ◆ Instantaneous and cumulative flow, pressure, and temperature can be displayed simultaneously.

    ◆ No preheating required; no response lag during measurement.

    ◆ Built-in 30 gas conversion factors; no additional error due to specific heat capacity, ensuring no impact on accuracy.

    The ACU20FC differential-pressure mass flow controller employs a differential-pressure mass measurement principle that features zero thermal drift and no response lag. It can simultaneously display and output parameters such as instantaneous flow rate, cumulative flow rate, pressure, and temperature. When control functionality is required, an electromagnetic proportional control valve and built-in PID regulation capabilities can also be added. Unlike thermal mass flow meters, the ACU20FC differential-pressure mass flow controller does not introduce additional “specific heat capacity” errors when using gas conversion factors. Therefore, even if the gas being measured differs from the calibration gas used at the factory, measurement accuracy remains unaffected.

    II. Product Applications

    The ACU20FC series differential-pressure mass flow controllers are widely used across various industries, including process manufacturing, food analysis, analytical testing, and metrology. Thanks to their multi-variable measurement capabilities and a 50:1 adjustable range, a single ACU20FC differential-pressure mass flow controller can replace the functionality of multiple devices. With an accuracy of 0.5%, repeatability of 0.2%, and a control response time of less than 200 milliseconds, these controllers ensure reliable operation of process gases.

    III. Product Parameters

    Series ACU20FC
    Model LC LM MC MM BC BM
    Measurement range 0–(2, 5, 10...1000) SCCM, 0–(1, 5, 10...30) SLM 0-(30,40,50...300) SLM 0-(300,400,500...3000) SLM
    Accuracy ±0.5% F.S.
    Repetitiveness ±0.2%F.S.
    Linear ±0.25% of F.S.
    Working differential pressure 0.1–0.5 MPa (specify when placing an order)
    Range ratio 50:1 100:1 50:1 100:1 50:1 100:1
    Typical response time 200 milliseconds (adjustable)
    Analog quantity 0–5V, 4–20mA
    Digital quantity RS232/485, MODBUS protocol
    Power supply 24VDC
    Communication protocol Modbus, DeviceNet, PROFINET, EtherCAT, PROFIBUS, and others
    Operating temperature +10~+50℃
    Work pressure drop <0.01 MPa
    Maximum working pressure 1MPa
    Electrical connection DB9 hole
    Protection level IP40
    Leak rate 1 × 10⁻⁹ Pa·m³/s
    Valve Valve normally closed / Valve normally closed / Valve normally closed /
    Base material Stainless steel
    Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether
    Body thread G3/8 internal thread G1/2 internal thread
    Joint Card holders, towers, quick-connect fittings, VCRs, flanges, and more

    IV. Product Dimension Diagram

    ACU20FC-LC Dimension Drawing

    ACU20FC-LM Dimension Drawing

    ACU20FC-MC Dimension Drawing

    ACU20FC-MM Dimensional Drawing

    ACU20FC-BC Dimension Drawing

    ACU20FC-BM Dimension Drawing

    V. Optional Supporting Measurement and Control Software (Additional charges apply)

    Mass Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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