ACU10FD-LC Dimensional Drawing
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ACU10FD Series
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Product Description
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ACU10FD | Real-World Remote Measurement and Control of 40 MFC Computers
https://mp.weixin.qq.com/s/GCGnE52pB9_DvmB33T0heQ
I. Product Overview
◆Thermal principle, fast response, high accuracy
◆ Tubular diversion, resistant to clogging
◆Suitable for various low- and high-pressure pipelines
◆ Short warm-up time, minimal zero drift, and high reliability
◆ Digital input/output can be used to control and display flow rate via secondary instruments or flow computers.
The ACU10FD mass flow controller consists of a mass flow sensor, a laminar flow element, a flow-control regulating valve, and an amplification and control circuit. It is designed based on the thermal conduction distribution effect, in which heat transfer by the flowing fluid alters the temperature distribution along the wall of the measuring capillary.
The ACU10FD mass flow controller measures gas mass flow using the differential-temperature calorimetric method based on heat transfer through a capillary tube, ensuring that the measurement is unaffected by temperature and pressure variations. The flow signal detected by the sensor is amplified and then compared with a setpoint voltage; the resulting error signal is used to drive the control valve, thereby implementing closed-loop regulation to maintain the flow rate in the channel at the desired setpoint.
II. Product Applications
Glass industry Solar energy Atmospheric Monitoring Industrial Production Petroleum and Petrochemical Coal Metallurgy Gas production and distribution Environmental protection Various instrumental analyses III. Product Specifications
Series ACU10FD Model LC LM MC Miss BC BM Measurement range 0–(2, 5, 10…1000) SCCM, 0–(1, 5, 10…30) SLM 0-(30, 40, 50...300) SLM 0-(300, 400, 500...3000) SLM Accuracy ±1.0% F.S Linear ±0.5% F.S. Repeatability ±0.2% F.S Working differential pressure 0.1–0.5 MPa (to be specified at the time of order) Range ratio 50:1 100 to 1 50:1 100 to 1 50:1 100 to 1 Response time <0.8s Analog quantity 0–5 V, 4–20 mA Digital quantity RS232/485, MODBUS protocol Power supply ±15 VDC, 24 VDC Operating temperature 0–50°C Work pressure drop <0.01 MPa Maximum withstand voltage 3 MPa / 10 MPa (specified at the time of order) Electrical Connection DB15 port Leak rate 1×10⁻⁹ Pa·m³/s Temperature coefficient ±0.025% F.S./°C Valve Valve remains closed / Valve remains closed / Valve remains closed / Base Material Stainless steel Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether Body thread G3/8 internal thread G1/2 internal thread Joint Compression fittings, ferrules, quick-connects, VCRs, flanges, etc. IV. Product Dimension Drawing
V. Optional Accompanying Measurement and Control Software (Additional charges apply)
Mass Flow Measurement and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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