ACU10FD-LC Dimension Drawing
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ACU10FD
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Product Description
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ACU10FD | Real-time Close-up of Remote Monitoring and Control for 40 MFC Computers
https://mp.weixin.qq.com/s/GCGnE52pB9_DvmB33T0heQ
I. Product Overview
◆Thermal principle, fast response, high accuracy
◆ Tubular shunt, resistant to clogging
◆ Suitable for various low-pressure and high-pressure pipelines
◆Short warm-up time, minimal zero drift, and high reliability
◆ Digital input/output can be used to control and display flow rates via secondary instruments or flow computers.
The ACU10FD mass flow controller consists of components such as a mass flow sensor, laminar flow separator, flow control regulating valve, and an amplification control circuit. It operates based on the thermal conduction distribution effect, where the heat transferred by the flowing fluid alters the temperature distribution along the walls of the measurement capillary tube.
The ACU10FD mass flow controller uses the capillary heat transfer method—measuring the temperature difference before and after heat transfer—to accurately determine the mass flow rate of gases, independent of temperature and pressure variations. The flow signal detected by the sensor is first amplified, then compared with a preset voltage. The resulting difference is used to precisely adjust the control valve, enabling closed-loop regulation of the flow through the channel until it matches the set flow rate.
II. Product Applications
Glass industry Solar energy Atmospheric Monitoring Industrial production Petroleum and Petrochemicals Coal Metallurgy Gas Generation and Gas Distribution Environmental protection Various instrumental analyses 3. Product Specifications
Series ACU10FD Model LC LM MC MM BC BM Measurement range 0–(2, 5, 10...1000) SCCM, 0–(1, 5, 10...30) SLM 0 - (30, 40, 50...300) SLM 0 - (300, 400, 500...3000) SLM Accuracy ±1.0% of F.S. Linear ±0.5% of F.S. Repeatability accuracy ±0.2% of Full Scale Work differential pressure 0.1–0.5 MPa (specified upon order) Measurement range ratio 50:1 100:1 50:1 100:1 50:1 100:1 Response time <0.8s Analog quantity 0–5V, 4–20mA Digital quantity RS232/485, MODBUS Protocol Power supply ±15VDC, 24VDC Operating temperature 0–50°C Work pressure drop <0.01 MPa Maximum withstand voltage 3 MPa / 10 MPa (specified upon order) Electrical connection DB15 port Leak rate 1 × 10⁻⁹ Pa·m³/s Temperature coefficient ±0.025%F.S/°C Valve Valve remains closed / Valve remains closed / Valve remains closed / Base material Stainless steel Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether Surface Thread G3/8 internal thread G1/2 internal thread Connector Crimping sleeves, pagodas, quick-connect fittings, VCR connectors, flanges, and more 4. Product Dimension Diagram
5. Optional Supporting Measurement and Control Software (Additional charges apply)
Quality Flow Measurement and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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