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ACU10FD

The ACU10FD digital mass flow controller consists of a mass flow sensor, laminar flow separator, flow controller regulating valve, and amplification control circuit. It features digital signal input and output, offering advantages such as short preheating time, minimal zero drift, and high reliability.

Product Description

  • Product Description
  • ACU10FD | Real-time Close-up of Remote Monitoring and Control for 40 MFC Computers

    https://mp.weixin.qq.com/s/GCGnE52pB9_DvmB33T0heQ

    I. Product Overview

    ◆Thermal principle, fast response, high accuracy

    ◆ Tubular shunt, resistant to clogging

    ◆ Suitable for various low-pressure and high-pressure pipelines

    ◆Short warm-up time, minimal zero drift, and high reliability

    ◆ Digital input/output can be used to control and display flow rates via secondary instruments or flow computers.

    The ACU10FD mass flow controller consists of components such as a mass flow sensor, laminar flow separator, flow control regulating valve, and an amplification control circuit. It operates based on the thermal conduction distribution effect, where the heat transferred by the flowing fluid alters the temperature distribution along the walls of the measurement capillary tube.

    The ACU10FD mass flow controller uses the capillary heat transfer method—measuring the temperature difference before and after heat transfer—to accurately determine the mass flow rate of gases, independent of temperature and pressure variations. The flow signal detected by the sensor is first amplified, then compared with a preset voltage. The resulting difference is used to precisely adjust the control valve, enabling closed-loop regulation of the flow through the channel until it matches the set flow rate.

    II. Product Applications

    Glass industrySolar energyAtmospheric MonitoringIndustrial productionPetroleum and Petrochemicals
    Coal MetallurgyGas Generation and Gas DistributionEnvironmental protectionVarious instrumental analyses

    3. Product Specifications

    SeriesACU10FD
    ModelLCLMMCMMBCBM
    Measurement range0–(2, 5, 10...1000) SCCM, 0–(1, 5, 10...30) SLM0 - (30, 40, 50...300) SLM0 - (300, 400, 500...3000) SLM
    Accuracy±1.0% of F.S.
    Linear±0.5% of F.S.
    Repeatability accuracy±0.2% of Full Scale
    Work differential pressure0.1–0.5 MPa (specified upon order)
    Measurement range ratio50:1100:150:1100:150:1100:1
    Response time<0.8s
    Analog quantity0–5V, 4–20mA
    Digital quantityRS232/485, MODBUS Protocol
    Power supply±15VDC, 24VDC
    Operating temperature0–50°C
    Work pressure drop<0.01 MPa
    Maximum withstand voltage3 MPa / 10 MPa (specified upon order)
    Electrical connectionDB15 port
    Leak rate1 × 10⁻⁹ Pa·m³/s
    Temperature coefficient±0.025%F.S/°C
    ValveValve remains closed/Valve remains closed/Valve remains closed/
    Base materialStainless steel
    Sealing materialFluororubber, nitrile rubber, EPDM, perfluoroether
    Surface ThreadG3/8 internal threadG1/2 internal thread
    ConnectorCrimping sleeves, pagodas, quick-connect fittings, VCR connectors, flanges, and more

    4. Product Dimension Diagram

    ACU10FD-LC Dimension Drawing

    ACU10FD-LM Dimension Drawing

    ACU10FD-MC Dimension Drawing

    ACU10FD-MM Dimension Drawing

    ACU10FD-BC Dimension Drawing

    ACU10FD-BM Dimension Drawing

    5. Optional Supporting Measurement and Control Software (Additional charges apply)

    Quality Flow Measurement and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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