ACU10FD-LC Dimensional Drawing
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ACU10FD Series
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Product Description
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ACU10FD | Real-time remote measurement and control of 40 MFC computers
https://mp.weixin.qq.com/s/GCGnE52pB9_DvmB33T0heQ
I. Product Overview
◆ Thermal principle, fast response, high accuracy
◆ Tubular shunt, less prone to blockage
◆ Suitable for various low-pressure and high-pressure pipelines
◆ Short warm-up time, minimal zero drift, and high reliability
◆ Digital inputs/outputs can use secondary instruments or flow computers to control and display flow rates.
The ACU10FD mass flow controller consists of a mass flow sensor, a laminar‑flow element, a flow‑control regulating valve, and an amplification‑and‑control circuit. It operates on the principle of thermal conduction—where heat transfer by the flowing fluid alters the temperature distribution along the wall of a measurement capillary.
The ACU10FD mass flow controller measures gas mass flow using the capillary‑based differential‑temperature calorimetric principle, ensuring independence from temperature and pressure variations. It amplifies the flow signal detected by the sensor, compares it with a setpoint voltage, and uses the resulting error to drive a control valve, thereby maintaining closed‑loop regulation of the flow rate through the channel to match the desired value.
II. Product Applications
Glass industry Solar energy Atmospheric monitoring Industrial manufacturing Petroleum and Petrochemicals Coal Metallurgy Gas production and gas distribution Environmental protection Various instrumental analyses III. Product Specifications
Series ACU10FD Model number LC LM MC MM British Columbia BM Measurement range 0–(2, 5, 10…1000) SCCM, 0–(1, 5, 10…30) SLM 0-(30,40,50...300)SLM 0-(300,400,500...3000)SLM Accuracy ±1.0%F.S Linear ±0.5%F.S Repeatability ±0.2%F.S Working differential pressure 0.1–0.5 MPa (to be specified at the time of order) Range ratio 50:1 100:1 50:1 100:1 50:1 100:1 Response time <0.8s Analog quantity 0–5 V, 4–20 mA Digital quantity RS232/485, MODBUS protocol Power supply ±15 VDC, 24 VDC Operating temperature 0–50°C Working pressure drop <0.01 MPa Maximum withstand voltage 3 MPa / 10 MPa (to be specified at the time of order) Electrical connection DB15 port Leak rate 1×10-9 Pa·m³/s Temperature coefficient ±0.025%F.S/℃ Valve Valve normally closed / Valve normally closed / Valve normally closed / Base material Stainless steel Sealing material Fluororubber, nitrile rubber, EPDM, perfluoroether Body thread G3/8 internal thread G1/2 internal thread Joint Ferrules, ferrule fittings, quick-connect couplings, VCR fittings, flanges, and more IV. Product Dimension Diagram
V. Optional Accompanying Measurement and Control Software (Additional charges apply)
Mass Flow Measurement and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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