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ACU10FD

The ACU10FD digital mass flow controller consists of a mass flow sensor, a laminar flow element, a flow control valve, and an amplifier control circuit. It uses digital signal input and output and features a short preheating time, small zero drift, and high reliability.

Product Description

  • Product Description
  • ACU10FD | Remote Monitoring and Control of 40 MFC Computers

    https://mp.weixin.qq.com/s/GCGnE52pB9_DvmB33T0heQ

    I. Product Overview

    ◆ Thermal principle, fast response, high accuracy

    ◆ Tubular flow divider, not easy to block

    ◆ Suitable for various low-pressure and high-pressure pipelines

    ◆ Short preheating time, small zero drift, high reliability

    ◆ Digital input/output can be used to control and display flow rate with secondary meters or flow computers

    The ACU10FD mass flow controller consists of a mass flow sensor, a laminar flow divider, a flow controller regulating valve, and an amplifier control circuit. It is made using the effect of heat conduction distribution where the heat transfer of the flowing fluid changes the temperature distribution of the measuring capillary wall.

    The ACU10FD mass flow controller uses the principle of calorimetry of the temperature difference before and after capillary heat transfer to measure the mass flow rate of gas, unaffected by temperature and pressure. The flow signal measured by the sensor is amplified and then compared with the set voltage. The resulting difference is used to drive the control regulating valve, closing the loop to control the flow rate through the channel to equal the set flow rate.

    II. Product Applications

    Glass industrySolar energyAtmospheric monitoringIndustrial manufacturingOil and petrochemicals
    Coal and metallurgyGas production and distributionEnvironmental protectionVarious instrument analyses

    III. Product Parameters

    SeriesACU10FD
    ModelLCLMMCMMBCBM
    Measurement Range0-(2,5,10...1000) SCCM, 0-(1,5,10...30) SLM0-(30,40,50...300) SLM0-(300,400,500...3000) SLM
    Accuracy±1.0%F.S
    Linearity±0.5%F.S
    Repeatability±0.2%F.S
    Operating Differential Pressure0.1~0.5MPa (specified when ordering)
    Measurement Range Ratio50:1100:150:1100:150:1100:1
    Response Time<0.8s
    Analog Signal0~5V、4~20mA
    Digital SignalRS232/485,MODBUS protocol
    Power Supply±15VDC,24VDC
    Operating Temperature0~50℃
    Operating Pressure Drop<0.01Mpa
    Maximum Withstand Pressure3MPa/10MPa (specified when ordering)
    Electrical ConnectionDB15 hole
    Leakage Rate1×10-9Pa m³/S
    Temperature Coefficient±0.025%F.S/℃
    ValveLong-closed valve/Long-closed valve/Long-closed valve/
    Base MaterialStainless steel
    Sealing MaterialViton, nitrile rubber, EPDM, perfluoroether
    Body ThreadG3/8 inner threadG1/2 inner thread
    ConnectorCompression fitting, pagoda, quick-connect, VCR, flange, etc.

    IV. Product Dimensions

    ACU10FD-LC Dimensions

    ACU10FD-LM Dimensions

    ACU10FD-MC Dimensions

    ACU10FD-MM Dimensions

    ACU10FD-BC Dimensions

    ACU10FD-BM Dimensions

    V. Optional Matching Monitoring and Control Software (Additional charges apply)

    Mass Flow Monitoring and Control System V5.0

Keyword:

Semiconductor and Microelectronics Manufacturing

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