ACU20FCH Series

The ACU20FCH series high-temperature steam flow controller/flowmeter utilizes a unique sensor and control valve to achieve accurate measurement and control of steam.

Category:

Gas Flow Meters and Flow Controllers

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I. Product Overview

◆ Can quickly and accurately measure the volumetric flow rate/mass flow rate of process gases/liquids/vapors.

◆ A custom-designed high-speed proportional control valve is used to precisely regulate the volumetric/mass flow rate of the medium.

◆ When measuring liquids, the uniquely designed vent hole allows air to be easily expelled.

◆ Setpoints and PID valve adjustments via a touch-sensitive display, with analog input/output and RS-485 digital communication interfaces also available.

◆ No internal movable components or heating elements; passed vibration resistance testing and is insensitive to installation orientation.

◆ Utilizing internally compensated laminar flow differential pressure technology, the fluid maintains laminar flow even over a wide flow range.

◆Provides comprehensive user support, including technical consultation, quick equipment calibration services, and a conditional lifetime warranty.

II. Product Applications

The ACU20FCH series high-temperature mass flow meters/controllers are widely used in various industries, including process manufacturing, food analysis, analytical testing, and metrology.

Multi-variable measurement and a 50:1 adjustable range enable a single ACU20FCH high-temperature mass flow meter/controller to replace the functionality of multiple devices. With an accuracy of 0.5%, repeatability of 0.5%, and a control response time of less than 200 milliseconds, this device ensures the reliable operation of process gases, liquids, and vapors.

III. Technical Parameters

Series	ACU20FCH
Model	LC	LM	MC	MM	BC	BM
Measurement range	Gas: 0–(2, 5, 10...1000) SCCM, 0–(1, 5, 10...30) SLM		Gas: 0–(30, 40, 50...300) SLM		Gas: 0–(300, 400, 500...3000) SLM
	Liquid: 0–(2, 5, 10...500) SCCM		Liquid: 0–(500, 600…1000) SCCM, 0–(1, 2, 3…10) SLM		Liquid: 0-(1, 2, 30...10) SLM
	Steam: 0–(2, 5, 10...1000) SCCM, 0–(1, 2, 3...10) SLM		0-(10,20,30...100)SLM		0-(100, 150, 200...500) SLM
Accuracy	±0.5% F·S
Repetitiveness	±0.5% F·S
Zero-point drift & Full-scale drift	0.02% F.S./°C/Atm
Working differential pressure	0.1–0.5 MPa (specified when ordering)
Range ratio	50:1	100:1	50:1	100:1	50:1	100:1
Typical response time	200 milliseconds (adjustable)
Analog quantity	0–5V, 4–20mA
Digital quantity	RS232/485, MODBUS protocol
Power supply	24VDC
Work pressure	<1 MPa
Electrical connection	DB9 hole
Protection level	IP40
Leak rate	1 × 10⁻⁹ Pa·m³/s
Valve	Valve normally closed	/	Valve normally closed	/	Valve normally closed	/
Base material	Stainless steel
Sealing material	Fluororubber, nitrile rubber, EPDM, perfluoroether
Body thread	G3/8 internal thread				G1/2 internal thread
Joint	Card holders, towers, quick connectors, VCRs, flanges, and more

Note: When the measured medium and flow rate differ, the product’s appearance and dimensions may vary.

IV. Product Dimension Diagram

Keyword:

Semiconductor and Microelectronics Manufacturing

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