A Successful Conclusion | ACCU Makes Its Debut at CSEAC 2026, the Wuxi Semiconductor Exhibition!

On the shores of Lake Tai, a new chapter begins. From August 31 to September 2, 2026, the 14th Semiconductor Equipment, Materials, and Core Components Exhibition (CSEAC 2026) will grandly open at the Wuxi Taihu International Expo Center. Industry leaders from around the world will gather to explore new opportunities for technological innovation and high-quality development in the semiconductor sector.
I. Focusing on the Cutting Edge of the Industry, Making a Striking Appearance

Beijing AccuFlow Technology Co., Ltd. (hereinafter referred to as “ACCU”), a specialized manufacturer in the field of precision fluid measurement and control, made a prominent appearance at this event with its core products and customized solutions. Leveraging its proprietary core technologies, ACCU showcased the robust capabilities of domestically produced precision fluid measurement and control equipment.
II. Precise Adaptation to Stringent Process Requirements

In semiconductor manufacturing processes, gas mass flow controllers (MFCs) are critical components in key steps such as lithography, chemical vapor deposition (CVD), etching, ion implantation, and diffusion. Their measurement and control accuracy, stability, and response speed directly determine the uniformity of thin films on wafers, profoundly influencing chip yield and product performance, making them indispensable core equipment in front-end semiconductor fabrication.
At the exhibition, ACCU showcased its comprehensive portfolio of core products, including gas mass flow controllers and meters, Coriolis mass flow controllers and meters, pressure controllers, and gas–liquid mixing evaporators.
Among these, the self-developed ACU20FE series Coriolis mass flow controllers are based on the classic Coriolis principle. They exhibit no thermal drift, with negligible temperature and time drift; gas measurement accuracy reaches ±0.5% of full scale, while liquid measurement accuracy achieves ±0.25% of full scale. The flow range spans from 0 to (20 g/h…1000 kg/h), accommodating a wide variety of flow conditions. Even under complex operating conditions involving fluctuations in pressure, temperature, density, conductivity, and viscosity, they maintain stable and highly accurate measurement and control performance. Also on display is the ACU20P series pressure controller, featuring a straight‑through design. Its pressure control range extends from 100 Pa to 40 MPa—supporting both absolute and gauge pressures—and it boasts key advantages such as high precision, excellent repeatability, and rapid stabilization. Furthermore, the device is compatible with multiple digital communication protocols, including RS‑485/RS‑232 Modbus, Profibus, and DeviceNet, enabling swift integration with a broad array of production‑line equipment.
In addition, the ACU20CEM gas–liquid mixing evaporation system has also attracted widespread attention. Comprising a liquid flow controller, a gas mass flow controller, and a temperature‑adjustable mixing evaporator, the system employs advanced control technologies to achieve precise measurement and regulation of liquid flow rate, carrier gas flow rate, and evaporation temperature. Over prolonged operation, it maintains a stable, drift‑free gas–liquid molar ratio, making it ideally suited for high‑precision gas–liquid mixing processes such as semiconductor thin‑film deposition.
III. Independent and Controllable Core Components

Behind ACCU’s cutting‑edge products lies the company’s deep, in‑house R&D expertise and extensive technological foundation. With high‑level R&D capabilities, a portfolio of invention patents and software copyrights, ACCU has achieved full independent control over its core components. Today, ACCU independently designs and manufactures high‑precision mass flow controllers and mass flow meters based on three major measurement principles—Coriolis, thermal, and laminar‑flow differential pressure—as well as industrial‑grade precision pressure controllers. These solutions are widely deployed across key national priority sectors, including semiconductor manufacturing, photovoltaic and new‑energy technologies, hydrogen energy, environmental protection, biopharmaceuticals, petrochemicals, and nuclear power, comprehensively addressing precision fluid‑measurement and control needs across all stages—from laboratory R&D to large‑scale production.

Throughout the exhibition, ACCU’s booth consistently drew large crowds. Industry experts, representatives from wafer‑fabrication companies, research‑institution teams, and specialized visitors flocked to the stand, stopping to seek in‑depth information on product specifications, process‑compatibility solutions, and real‑world application cases. In-depth discussions centered on precision fluid‑control technologies, and numerous companies expressed clear intentions to collaborate, underscoring ACCU’s robust technical expertise and its steadily growing influence in the high‑end front‑end semiconductor equipment sector.
IV. The Exhibition Concludes, Yet the Journey Continues
Looking ahead, ACCU will continue to place technological innovation at the heart of its growth and pursue industrial collaboration as its development strategy. The company will deepen its efforts to master core front-end semiconductor technologies, focusing on the demanding operating conditions of semiconductor equipment, while remaining committed to the independent research, development, and manufacturing of precision fluid measurement and control systems. Catering to diverse process conditions—such as handling different media, meeting high‑precision requirements, and accommodating vacuum and high‑pressure environments—ACCU offers customized fluid measurement and control solutions that comprehensively address key application areas including semiconductor wafer processing, vacuum equipment, and new energy. These solutions strike a balance across equipment operational stability, measurement accuracy, and adaptability to specific application scenarios.

With the exhibition now concluded, ACCU remains true to its original vision and presses forward. The company will continue to deepen its expertise in the precision fluid measurement and control sector, upholding a commitment to independent innovation and relentless pursuit of excellence in R&D. By refining cutting-edge products and delivering reliable technologies and solutions, ACCU aims to contribute to the upgrading of China’s semiconductor industry and to the high‑quality development of China’s chip sector.
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