ACU20FDR Series Low-Differential-Pressure Gas Mass Flow Controllers
In numerous high-end manufacturing and research fields—including the semiconductor and integrated circuit industries, specialty materials, heat treatment, petrochemicals, environmental protection, and vacuum applications—precise gas metering and stable control are critical to ensuring production quality.
For measurement and control under low-pressure, high-flow conditions, Beijing ACCUFLOW has independently developed and designed the ACU20FDR series of low‑pressure‑drop gas mass flow controllers (MFCs), based on the thermal‑anemometric principle, to measure and perform closed-loop control of gas mass flow. With its distinctive design philosophy and outstanding performance, it delivers a reliable solution for gas flow measurement and control.
The ACU20FDR series is based on the thermal‑diffusion and sensing‑detection principles and comprises a flow‑sensing module, a temperature‑compensation unit, a high‑flow‑capacity solenoid valve, and a digital signal‑processing and communication module. Operating on the principle that electrical power is directly proportional to the mass flow rate of the gas, it incorporates a temperature sensor for temperature compensation. High-precision, fast-response flow measurement and control have been achieved. , meanwhile, it is equipped with a high‑flow solenoid valve, making the ACU20FDR series particularly well suited for operation under conditions where system pressure is virtually nonexistent, Precise control of gas flow, combined with low-pressure-difference regulation, ensures minimal impact on the system and enables stable operation at pressures close to atmospheric.
Core Advantages:
High precision and wide measurement range: The ACU20FDR delivers a wide control ratio, with measurement accuracy of ±0.5% F.S. and repeatability of ±0.2% F.S., making it well suited for applications in semiconductor thin-film deposition, gas chromatography, catalytic reactions, vacuum heat treatment, and other industries that demand high‑precision flow control.
Quick response: The ACU20FDR features a short warm-up time and rapid response, enabling swift initiation of fluid measurement and control tasks. Its high‑precision sensor and optimized circuit design effectively minimize zero drift, enhance measurement sensitivity and long-term stability, and ensure reliable data under continuous operation.
Stable and reliable: Featuring a tubular bypass design, it not only effectively mitigates the risk of blockage but also exhibits robust anti‑interference performance, ensuring long‑term stable operation in industrial environments subject to vibration, dust, and temperature fluctuations.
Highly scalable: Supports analog input and output, features configurable multi‑type industrial communication interfaces, and is compatible with protocols such as RS‑232/485, MODBUS, and PROFIBUS. It can be connected to an external display unit and offers customizable valve and PID control, enabling convenient remote operation and data acquisition while enhancing adaptability across a wide range of applications.
Application Cases:
ACU20FDR Low-Pressure-Drop Mass Flow Controller/Flow Meter Focusing on the requirements for low-pressure, high-flow, and high-precision measurement and control. , has already achieved large-scale deployment across multiple industries, for example:
• Energy and Environmental Protection Sector: It is used for natural gas metering or flue gas analysis, providing reliable data support for carbon emission monitoring.
• Catalytic cracking process: It is used to control the atmosphere flow in the reactor to optimize fuel oil yield.
• Environmental Monitoring Station: Used for sampling and analyzing harmful gases in the air, such as PM2.5 and volatile organic compounds (VOCs).
• Gas carburizing furnace: Thanks to its low-pressure-drop characteristics, the challenge of controlling the flow rate of carburizing gas in low-pressure supply systems has been effectively addressed. This has led to improved furnace atmosphere control and greater consistency in carburizing quality.
The ACU20FDR series of low-pressure-drop gas mass flow controllers and meters, with their low‑pressure compatibility, high accuracy, and rapid response, have become the industry’s trusted choice for low‑pressure applications. They not only enhance production efficiency and product quality but also meet the demanding requirements of everything from cutting‑edge R&D to harsh industrial environments. In response to increasingly precise manufacturing needs, the ACU20FDR continues to deliver reliable flow measurement and control performance, providing customers with dependable support.
Previous page
Previous page:
Related Products
ACU20FD Normally Open Valve Series
Contact Information
Address: Room 1522/23,Building B,Ruichuang International Center,No.8Wangjingdong Road,Chaoyang District,Beijing (R&D Department)
Leave a message
If you are interested in our products, please leave your email address, and we will contact you as soon as possible, thank you!