Coriolis Mass Flow Controller — Precise Measurement and Control of Ultra-Low Flow Rates
In industrial applications such as semiconductor manufacturing, biopharmaceuticals, and aerospace, the precise measurement and control of minute fluid flow rates directly determine process stability. When dealing with very low flow rates or media with low electrical conductivity—such as ultrapure water or deionized water—measurement inaccuracies and data drift often arise. The Coriolis mass flow controller (MFC), leveraging its unique principle of directly measuring mass flow, offers a fundamental solution to these technical challenges.
ACCU Independently developed ACU20FE Coriolis Mass Flow Controller Based on the classical Coriolis effect, it integrates a high‑precision single‑loop sensor, an intelligent control circuit, and a high‑speed proportional control valve to form a complete closed‑loop precision measurement and control system. The uniquely designed single‑loop sensor serves as the core component of the oscillation system: when fluid flows through it, a Coriolis force arises that is strictly proportional to the mass flow rate, inducing a phase shift in the vibration. This phase signal is accurately captured by the sensing unit and transmitted to the onboard DSP processor for real‑time computation, yielding an instantaneous mass flow reading. This measurement approach is immune to external influences such as temperature, pressure, flow velocity, density, electrical conductivity, and viscosity, thereby ensuring high accuracy and stability at the fundamental level. Whether in high‑temperature, high‑pressure chemical environments or in the food and pharmaceutical industries—where precision is paramount—it delivers accurate and reliable data.
The ACU20FE series mass flow controllers offer excellent metering stability, low repeatability error, and high accuracy. Liquids can achieve an accuracy of ±0.25%, while gases achieve ±0.5%. It can simultaneously measure mass flow rate, fluid density, and temperature, with output signals. No temperature or pressure compensation is required, and it is compatible with a wide range of media—including liquids, gases, and supercritical fluids—covering complex applications such as low‑viscosity solvents, high‑viscosity chemicals, corrosive acids and bases, and high‑density gases. Moreover, it exhibits exceptionally low thermal and time drift, with no thermal drift interference. Precise flow measurement and control enable enterprises to accurately manage the dosing of reaction feedstocks, optimize production processes, enhance product quality, and reduce manufacturing costs. Even when only minute flow variations are needed, it delivers highly accurate regulation, ensuring process stability and consistent product quality.
The ACU20FE series Coriolis mass flow controllers excel in low‑flow measurement and control, a capability that enables them to play a critical role in industries—such as fine chemicals and pharmaceuticals—that are highly sensitive to flow variations.
• Petrochemical industry: Used for raw material proportioning, reaction process control, and product metering;
• Pharmaceutical industry: It is used for precise control in processes such as pharmaceutical solution preparation and filling, ensuring accurate dosing of active ingredients in the formulation.
• Food and Beverage Industry: Used for quality monitoring during batching, blending, and filling processes;
• Semiconductor manufacturing: It is used for the precise delivery of specialty gases and chemicals, accurately controlling the flow rates of etching gases and chemicals.
• Energy sector: It is used for the precise trade settlement of liquefied natural gas (LNG).
In addition, the product has earned widespread recognition in aerospace and other fields for its high reliability. Catering to the minute‑quantity requirements of laboratory and microfluidic applications, it offers a measurement range down to the microgram‑per‑minute level, making the company the only domestic manufacturer to have industrialized Coriolis mass flow controllers at this precision level.
Coriolis mass flow controllers, with their distinct advantages, transcend the limitations of conventional measurement and control methods, providing a robust foundation for precision‑driven, autonomous upgrades in high‑end manufacturing. As demand for automated flow control continues to grow, their technological value will become increasingly evident.
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