Analysis of the Sensor Architecture and Signal Processing Chain for Gas Mass Flow Meters

2025-11-13

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The sensor architecture of the gas mass flowmeter is the key to achieving highly accurate measurements.

ACU10FA-LM Analog Gas Mass Flow Meter, ACU10FD-MM Digital Gas Mass Flow Meter

 

Commonly used thermal gas mass flow meter sensors typically consist of two reference-grade resistance temperature detectors (RTDs): a velocity sensor and a temperature sensor. The velocity sensor is heated to a temperature higher than that of the medium, while the temperature sensor measures the actual temperature of the medium itself. When gas flows past the sensor, it carries away heat, causing the velocity sensor's temperature to drop. To maintain a constant temperature difference, the heating power must be adjusted—this adjustment is closely related to the gas mass flow rate.

Working Principle Diagram

The signal processing chain is responsible for converting the weak electrical signals output by the sensor into readable flow data. The sensor’s output signal first passes through an amplifier to boost its strength, enhancing the overall signal intensity. Next, the signal undergoes filtering to eliminate noise interference, ensuring signal purity. Finally, the processed signal enters the signal processing unit, where it is converted from an analog signal to a digital signal via an analog-to-digital converter (ADC), making it ready for subsequent digital processing.

ACU20FD-MM High-Precision Gas Mass Flow Meter

 

During the digital processing stage, the microprocessor analyzes the digital signal according to a pre-set algorithm, calculating the mass flow rate of the gas. To enhance the accuracy and stability of the measurement, the signal-processing chain may also incorporate additional steps such as temperature compensation and linearization, which help eliminate the influence of environmental temperature, gas composition, and other factors on the measurement results. Finally, the processed flow data is transmitted via a communication interface—such as RS-485 or HART—to a host computer or control system, enabling remote monitoring and automated control.

Related Products

ACU10FA


The ACU10FA analog-type mass flow controller features fast response and high precision. It offers a wide control range, with a flow rate capability spanning from 5 SCCM to 30 SLM, and can accurately measure and regulate flows as low as 1 SCCM—making it ideal for controlling even the tiniest gas flows.

ACU10FD


The ACU10FD digital mass flow controller consists of a mass flow sensor, laminar flow separator, flow controller regulating valve, and amplification control circuit. It features digital signal input and output, offering advantages such as short preheating time, minimal zero drift, and high reliability.

ACU10FDR


The ACU10FDR low-pressure-drop gas mass flow controller is equipped with a proprietary high-flow electromagnetic valve, making it ideal for controlling mass flow even when system pressure is nearly unavailable. Its minimal pressure differential ensures the least possible impact on the system, enabling precise flow control under near-atmospheric conditions while significantly reducing system response time. We can customize the valve and PID control features based on your specific application parameters, guaranteeing fast, stable performance with minimized pressure loss.

ACU10FC


The ACU10FC differential-pressure mass flow controller employs a differential-pressure-based mass measurement principle that features no thermal drift and zero response lag. It can simultaneously display and output parameters such as instantaneous flow rate, totalized flow, pressure, and temperature. When control functionality is required, an electromagnetic proportional control valve can be added, along with built-in PID regulation capabilities. Unlike thermal mass flow meters, the ACU10FC eliminates any additional "specific heat capacity" error when using gas conversion factors. As a result, even if the gas being measured differs from the calibration gas used at the factory, the measurement accuracy remains unaffected.

ACU10P


The ACU10P series pressure controllers/pressure gauges feature a straight-through design, with measurement ranges from 100 kPa to 10 MPa (both absolute and gauge pressures are supported). Additionally, differential pressure transmitters are also available.