Current Status of Pressure Controller Technology Development and a Review of Key Technologies

2026-04-10

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As a core component of industrial automation and precision manufacturing, pressure controllers are now fully transitioning into the digital and high-precision era. Today, digital pressure controllers have become the market mainstream: global sales reached US$1.715 billion in 2023 and are projected to grow to US$1.966 billion by 2030. Notably, the semiconductor manufacturing sector is driving particularly strong growth, with a market size of approximately US$1.56 billion in 2025. This segment is expected to expand at a compound annual growth rate of 8.6% to reach US$2.78 billion by 2034, underscoring the robust demand for precise pressure control in high-end manufacturing.
At the technological roadmap level, piezoresistive and capacitive sensing remain the mainstream approaches. Taking ACU20P Series Take the pressure controller as an example: it employs an advanced piezoelectric diaphragm-type pressure sensor combined with a digital circuit design to ensure high precision, stability, and reliability in pressure measurement and control. The core sensing element features a silicon-based piezoresistive bridge structure, in which a ultra-thin pressure-sensitive diaphragm is formed by precision etching on the backside of a meticulously fabricated silicon chip; the diaphragm thickness is precisely tailored to meet the requirements of different measurement ranges. When external pressure acts on the diaphragm, its deformation causes changes in the resistance of the Wheatstone bridge, thereby generating a highly linear pressure signal that guarantees measurement accuracy and long-term stability.


Building on this foundation, the ACU20P series pressure controllers and pressure gauges feature a straight-through design, with a measurement range spanning 100 kPa to 10 MPa (available in both absolute and gauge pressure configurations), and offer optional differential pressure transmitters. This series delivers high accuracy and excellent repeatability, supporting both forward-pressure control and back-pressure control modes. Standard equipment includes a high-precision pressure sensor and a digital circuit board that integrates all functions required for pressure control, enabling fast, stable, and reliable pressure regulation. In addition to the standard RS485 output signal, the ACU20P also provides analog input/output signals, allowing users to precisely control the entire process simply by adjusting the setpoint.
The ACU20P series can be equipped with either integrated or split-type control valves, both of which feature proportional solenoid-controlled valve designs that deliver ultra-fast response and smooth, stable control. This series is widely used in semiconductor manufacturing processes, gas-phase and liquid-phase chromatographs, steam-pressure control in MOCVD processes, gas-pressure protection control in extrusion molding, and pressure control in autoclaves and reactors, among other applications. Thanks to its outstanding sensing and control performance, the ACU20P provides reliable technical support for a wide range of precision industrial fields.


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The ACU10FA analog-type mass flow controller features fast response and high precision. It offers a wide control range, with a flow rate capability spanning from 5 SCCM to 30 SLM, and can accurately measure and regulate flows as low as 1 SCCM—making it ideal for controlling even the tiniest gas flows.

ACU10FD


The ACU10FD digital mass flow controller consists of a mass flow sensor, laminar flow separator, flow controller regulating valve, and amplification control circuit. It features digital signal input and output, offering advantages such as short preheating time, minimal zero drift, and high reliability.

ACU10FDR


The ACU10FDR low-pressure-drop gas mass flow controller is equipped with a proprietary high-flow electromagnetic valve, making it ideal for controlling mass flow even when system pressure is nearly unavailable. Its minimal pressure differential ensures the least possible impact on the system, enabling precise flow control under near-atmospheric conditions while significantly reducing system response time. We can customize the valve and PID control features based on your specific application parameters, guaranteeing fast, stable performance with minimized pressure loss.

ACU10FC


The ACU10FC differential-pressure mass flow controller employs a differential-pressure-based mass measurement principle that features no thermal drift and zero response lag. It can simultaneously display and output parameters such as instantaneous flow rate, totalized flow, pressure, and temperature. When control functionality is required, an electromagnetic proportional control valve can be added, along with built-in PID regulation capabilities. Unlike thermal mass flow meters, the ACU10FC eliminates any additional "specific heat capacity" error when using gas conversion factors. As a result, even if the gas being measured differs from the calibration gas used at the factory, the measurement accuracy remains unaffected.

ACU10P Series


The ACU10P series pressure controllers/pressure gauges feature a straight-through design and cover a measurement range from 100 kPa to 10 MPa (both absolute and gauge pressures are supported). In addition, differential pressure transmitters are also available.