Characteristics and Applications of Laminar Flow Differential Pressure Mass Flow Controllers
The laminar-flow differential-pressure MFC, or laminar-flow differential-pressure mass flow controller, is an instrument used for the measurement and control of gas mass flow. It achieves this by employing a laminar-flow element to stabilize the gas flow into a regular laminar regime and then using a differential-pressure sensor to measure the pressure difference across the element, from which the gas flow rate is calculated.
In recent years, laminar-flow differential-pressure mass flow control products have been widely adopted in advanced manufacturing sectors such as semiconductors, photovoltaics, biomedicine, and specialized industries, thanks to their outstanding advantages, including high accuracy, fast response, low zero drift, and compatibility with multiple gases.
Among them, the ACU20FC series, as a high-precision differential-pressure flow controller/flow meter, leverages a differential-pressure mass-flow measurement principle that exhibits no thermal drift and no response lag, coupled with outstanding product accuracy, to simultaneously display and output key parameters in real time, including instantaneous flow, cumulative flow, pressure, and temperature. When flow control functionality is required, an optional solenoid proportional control valve and a built-in PID control module can be configured to enable closed-loop precision control. 
Features of the ACU20FC High-Precision Differential-Pressure Flow Controller/Flow Meter:
◆ No thermal drift; negligible temperature and time drift; long-term stability of 0.1% of full scale per year.
◆ Accuracy of 0.5%; measurement range can be set via buttons within a 100:1 span, with no need for calibration.
◆ Simultaneous display of instantaneous and cumulative flow, pressure, and temperature
◆ No warm-up required; no response lag during measurement.
◆ Built-in 30 gas conversion coefficients; negligible additional error in specific heat capacity, with no impact on accuracy.
The ACU20FC differential-pressure mass flow controller employs a differential-pressure-based mass measurement principle that exhibits no thermal drift and no response lag, enabling simultaneous display and output of instantaneous flow, cumulative flow, pressure, temperature, and other parameters. When control functionality is required, it can be equipped with a solenoid proportional control valve and built-in PID control. Unlike thermal mass flow meters, the ACU20FC differential-pressure mass flow controller does not introduce additional “specific heat” errors when gas conversion factors are used. Consequently, even if the measured gas differs from the calibration gas specified at the factory, measurement accuracy remains unaffected.
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