Introduction to High-Precision Mass Flow Controllers/Flow Meters and Seal Selection
With the rapid growth of industries such as new energy, new materials, and semiconductors, the requirements for precision in gas flow measurement and control are becoming increasingly stringent. Production lines must not only achieve accurate regulation of extremely low flow rates but also address the challenges posed by corrosive and ultra‑high‑purity media. Against this backdrop, Jin… As a critical foundational component, the sealed gas mass flow controller plays an essential role in core process equipment such as chemical vapor deposition (CVD), physical vapor deposition (PVD), and etching systems.
ACCU Specializing in the measurement and control of precision fluid flow, its portfolio includes… The self-developed 20FD series high-precision metal-sealed gas mass flow meters/flow controllers are based on the thermal capillary‑based differential‑temperature calorimetry principle, enabling direct measurement of gas mass flow while ensuring that the measured values remain unaffected by fluctuations in temperature and pressure.
▲20FD-LC High-Precision Mass Flow Controller with DeviceNet™ Protocol
The 20FD series features a wide flow‑rate range, with standard ranges from 0 to (2 SCCM…10,000 SLM), and supports custom non‑standard configurations. 。 Accuracy can reach ±0.5% of full scale, while also offering short warm-up time, minimal zero drift, rapid response, and long-term stability. Its tubular diversion structure is resistant to clogging. The 20FD series supports analog input/output and a variety of digital communication protocols, including RS-232/485, Modbus, PROFIBUS, DeviceNet™, and… EtherCAT® Optional. Compatible with various communication architectures on the production line, and can also utilize secondary instruments or flow computers to control and display flow rates, enabling remote, automated operation.
Seal Material and Corrosion-Resistant Selection:
The corrosion resistance, process safety, and service life of a gas mass flow controller hinge on its sealing design and sealing materials, which also serve as critical criteria for selecting the appropriate operating conditions. The ACU20FD gas mass flow controller can be used to control a wide range of gases. , Components in contact with process gases are typically made of 316L stainless steel. Metal sealing or elastomeric sealing:
1. Metal sealing:
▲20FD-LC High-precision metal-sealed gas mass flow controller
Typically, materials with high corrosion resistance—such as stainless steel, gold, and nickel—are used; in theory, they are compatible with any gas, including various corrosive gases and high-purity specialty gases. For highly corrosive media like boron tribromide (BBr₃) and boron trichloride (BCl₃), as well as the metal‑organic compounds employed in MOCVD processes, We recommend the ACU20FD metal-sealed mass flow controller, which features a custom all-metal sealing design. , specifically designed for industrial applications requiring precise gas‑flow control, it effectively resists corrosive gas attack and minimizes the impact of contaminant and particulate adsorption on gas purity, delivering a highly accurate and reliably robust measurement and control solution for high‑purity gas applications.
2. Elastic Sealing:
Rubber elastomer seals are suitable for inert and mildly corrosive conventional process gases. Due to their lower cost, fluorocarbon materials are commonly used. Rubber (FKM) is resistant to most dry acidic and alkaline gases, as well as halogen gases, at low concentrations. However, when dealing with environments featuring significant pH levels or particularly corrosive gases, it is essential to select a specialized rubber that precisely matches the specific conditions; for example, ammonia requires the use of… Ammonia-resistant rubber (such as ethylene propylene rubber) ; Boron tribromide and boron trichloride, on the other hand, require higher costs. Perfluoroether rubber (FFKM) 。
Leveraging precise operating-condition adaptation and reliable product quality, the 20FD series mass flow controllers have been deployed across a wide range of high-end manufacturing lines, delivering customized fluid measurement and control solutions to numerous partners and earning widespread recognition.
For precise application‑specific selection and detailed product specifications and compatibility solutions, please contact us to receive a customized selection guide and tailor an efficient flow measurement and control solution for your production line.
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