High-temperature mass flow controller flow meter
In industries such as energy, semiconductors, and chemicals, ensuring process stability and product quality often requires precise control of fluid flow under high-temperature conditions. We have developed mass flow controllers/flow meters suitable for high-temperature applications specifically for these industries.
Compared with similar products on the market, our product series boasts an advanced internal compensation laminar flow differential pressure technology built upon the differential pressure principle. This technology enables the instrument to automatically adjust the conversion factor between differential pressure and flow rate, achieving internal compensation. As a result, even under high-temperature conditions and at high flow rates, the instrument can maintain measurement precision and accuracy. This technology effectively addresses the issue of reduced measurement accuracy typically encountered by conventional laminar flow differential pressure sensors in high-temperature environments, thereby broadening the product series' user base across various industries.
The measurement range is from -20℃ to a maximum of 350℃. When a high-temperature fluid flows through the fine channels inside the sensor, the flow remains laminar due to the geometry of the channels and the fluid’s properties. Because of limitations such as fluid viscosity and channel dimensions, laminar flow generates a pressure differential. To eliminate the accuracy degradation caused by high fluid temperatures, the instrument’s internal sensor automatically adjusts the conversion factor between differential pressure and flow rate based on the relationship between fluid temperature and viscosity, thereby achieving internal compensation.
On this basis, the sensor converts the precisely measured pressure difference into an electrical signal. The controller then processes this pressure difference signal to ultimately determine the temperature of the high-temperature fluid. Volumetric flow rate or mass flow rate.
In the specific control operation, the operator sets the desired flow rate via the display screen or communication interface. The controller then uses a PID control algorithm to adjust the opening of the control valve based on the deviation between the actual flow rate and the setpoint. Changes in the control valve’s opening will alter the fluid flow passing through the sensor, thereby gradually bringing the actual flow rate closer to the setpoint. By continuously adjusting the control valve, the actual flow rate is ultimately stabilized near the setpoint.
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