A semiconductor company: ultra-short lead time and stable supply support thin film deposition process
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Project Background: The semiconductor industry is experiencing a second growth curve
Driven by generative artificial intelligence, the semiconductor industry has rebounded significantly this year. According to various predictions, the semiconductor industry will continue to grow, and is expected to surpass the $1 trillion milestone by 2030. In China, facing the severe reality of being "stuck" in semiconductor technology, its development speed ranks first in the world, and the demand is large. The country also attaches great importance to the development of semiconductors and continues to introduce supporting policies.
Company Overview: Committed to the domestication of semiconductor technology
A semiconductor company served by Jingliang Technology is committed to domestic substitution and specializes in silicon carbide processes. After years of process accumulation, it has now formed a series of products including etching equipment and thin film deposition equipment, mainly used in the front-end process stage of semiconductors, such as silicon carbide and gallium nitride compound semiconductors.
Process Requirements: Short supply cycle, ensuring production quality
The semiconductor company provides downstream customers with thin film deposition, etching, and de-bonding equipment, used to manufacture and deposit thin film layers on substrate materials to form the functional layers of chips. In the chemical vapor deposition (CVD) process, a gas-liquid mixing evaporator is required to evaporate and mix liquid source materials to form a uniform film during deposition.
The semiconductor company contacted Jingliang Technology to learn about Jingliang Technology's evaporator products to replace a foreign brand and put forward the following requirements:
1. Short and stable supply cycle;
2. Ensure complete liquid evaporation;
3. Fast response speed, uniform mixing and evaporation of gas output;
4. Liquid flow accuracy reaches the specified standard.
Solution: Short supply cycle, ensuring production quality
After understanding the needs, Jingliang Technology designed a gas-liquid mixing evaporation system for the customer based on the mixed medium and operating conditions.
The system is configured with a controllable evaporation mixer x1, a liquid mass flow controller x1, a gas mass flow controller x1, and a temperature controller x1.
Figure: ACU20CEM controllable evaporation mixer product used in the gas-liquid mixing evaporation system
System configuration is as follows:
Controllable evaporation mixer: Using the ACU20CEM model, the maximum gas range is 10 ln/min, and the minimum liquid (water) range is 120g/h.
Liquid mass flow controller: ACU20FE Coriolis mass flow controller, accuracy ±0.25% F.S, repeatability 0.05% F.S.
Gas mass flow controller: ACU20FD high-precision controller, accuracy ±0.5% F.S, repeatability ±0.2% F.S.
Temperature controller: Controllable up to 200℃~300℃ high temperature, fully meeting the evaporation conditions of the specified medium.
Project Benefits: Assisting in the efficient and high-quality preparation of films
The semiconductor company uses Jingliang Technology's gas-liquid mixing evaporation system, and the overall accuracy, response time, evaporation efficiency, and flow rate performance and indicators all meet the company's existing operating conditions and requirements. In the specific use process, the following benefits have been achieved:
1. Ensuring the normal operation of production work
With nearly 10 years of accumulation, Jingliang Technology has established a highly efficient supply system, from R&D, production, and debugging to delivery. Its short supply cycle does not affect customer use and normal operation. With efficient production and debugging procedures, it can meet customer requirements for order time and quantity.
2. Ensuring high-quality film processes
The system uses high-precision equipment to fully meet the standard requirements of uniform gas output, high evaporation efficiency, and fast response time during the deposition process.
3. Assisting in efficient film production work
Jingliang Technology's gas-liquid mixing evaporation system has stable and reliable overall performance, a wide range, and meets the needs of different operating environments, helping companies efficiently and stably produce integrated circuit films.
Precise mixing and evaporation are carried out in some semiconductor and new material processes to ensure the stability of the deposited film quality. Jingliang Technology's evaporation system plays an important role in the gas-liquid mixing process and has been recognized by many domestic companies involved in film deposition processes, and has established long-term strategic partnerships with them.
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Contact Information
Address: Room 1522/23, Building B, Ruichuang International Center, No. 8 Wangjingdong Road, Chaoyang District, Beijing (R&D Department)
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