Measurement and Control of Micro-Flow Rates of Gases, Liquids, and Gas-Liquid Two-Phase Critical Fluids

2025-12-26

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In industrial applications and scientific research experiments, there is an increasing demand for the measurement and control of minute flows of gases and liquids. Currently, our company offers three types of micro-flow mass flow meters/mass flow controllers: thermal, differential pressure, and Coriolis principles.

This type of micro-flow mass flow meter/flow controller is suitable for both industrial and laboratory online process control applications, as well as for the quantitative measurement or delivery of gases or liquids.

The main features of our company’s micro-flow mass flow meter/mass flow controller include:

◆ Low pressure loss; fast response, high accuracy, wide measurement range—up to 100:1.

◆ Short warm-up time, minimal zero drift, and high reliability;

◆ Simple installation and easy operation; for certain models or applications, it can be installed in any position.

◆ Highly adaptable, leveraging coupled vibration isolation technology to make the product insensitive to on-site vibration disturbances.

◆Some models of the product also feature measurement functions for pressure, temperature, and density.

◆ Digital input/output can be used for flow control and measurement via upper-level devices such as secondary instruments, flow computers, PLCs, or computers.

For the measurement and control of very small gas flow rates, we primarily employ thermal-based principles and laminar-flow differential-pressure principles. The control range can be expanded up to 100:1, while the response is significantly more sensitive, with a response time of ≤200 ms. The accuracy (precision) is comparable to that of high-precision imported brands.

In addressing corrosive gases, we offer a variety of elastomeric and polymeric seals—including fluororubber, ethylene-propylene rubber, and polytetrafluoroethylene—as well as all-metal seals, providing solutions that meet diverse application requirements. The parts in contact with the gas are made from stainless steels such as 316L; for certain special applications, we can also supply seals made from Hastelloy alloys.

For the measurement and control of tiny flow rates of liquids or gas-liquid mixed critical fluids, our products primarily employ differential-pressure principles as well as the Coriolis force (Coriolis effect) principle. Coriolis flow meters/controllers directly measure and control the mass flow rate of the medium being measured, unaffected by fluid properties. Therefore, they can also accurately measure and control the flow rates of fluids with unknown or unspecified compositions. In particular, for the precise measurement and control of tiny flow rates and high-viscosity fluids, our products have significantly addressed the shortcomings currently found in domestic brands of flow meters/controllers. 
 


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The ACU10FA analog-type mass flow controller features fast response and high precision. It offers a wide control range, with a flow rate capability spanning from 5 SCCM to 30 SLM, and can accurately measure and regulate flows as low as 1 SCCM—making it ideal for controlling even the tiniest gas flows.

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The ACU10FD digital mass flow controller consists of a mass flow sensor, laminar flow separator, flow controller regulating valve, and amplification control circuit. It features digital signal input and output, offering advantages such as short preheating time, minimal zero drift, and high reliability.

ACU10FDR


The ACU10FDR low-pressure-drop gas mass flow controller is equipped with a proprietary high-flow electromagnetic valve, making it ideal for controlling mass flow even when system pressure is nearly unavailable. Its minimal pressure differential ensures the least possible impact on the system, enabling precise flow control under near-atmospheric conditions while significantly reducing system response time. We can customize the valve and PID control features based on your specific application parameters, guaranteeing fast, stable performance with minimized pressure loss.

ACU10FC


The ACU10FC differential-pressure mass flow controller employs a differential-pressure-based mass measurement principle that features no thermal drift and zero response lag. It can simultaneously display and output parameters such as instantaneous flow rate, totalized flow, pressure, and temperature. When control functionality is required, an electromagnetic proportional control valve can be added, along with built-in PID regulation capabilities. Unlike thermal mass flow meters, the ACU10FC eliminates any additional "specific heat capacity" error when using gas conversion factors. As a result, even if the gas being measured differs from the calibration gas used at the factory, the measurement accuracy remains unaffected.

ACU10P Series


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