ACU20FD-LC Metal Seal Small Size Diagram
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Metal Seal
The ACU20FD digital mass flow meter consists of a mass flow sensor, a laminar flow element, a flow control valve, and an amplification and control circuit. It uses digital signal input and output and features a short preheating time, small zero drift, and high reliability.
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Product Description
- Product Description
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I. Product Overview
◆ Thermal principle, higher accuracy, faster response, with network port
◆ Tubular flow distribution, not easy to block
◆ Suitable for various low-pressure and high-pressure pipelines
◆ Short preheating time, small zero drift, high reliability
◆ Analog input/output can be used to control and display flow rate with a secondary instrument or flow computer
The ACU20FD high-precision mass flow meter/flow controller uses the principle of calorimetry of the temperature difference before and after capillary heat transfer to measure the mass flow rate of gas, which is not affected by temperature and pressure. The flow signal measured by the sensor is amplified and then compared with the set voltage. The obtained difference is used to drive the control regulating valve to close the loop control of the flow rate through the channel so that it is equal to the set flow rate.
II. Product Applications
Glass industry Solar energy Atmospheric monitoring Industrial manufacturing Petroleum and petrochemical Coal and metallurgy Gas production and distribution Environmental protection Various instrument analysis III. Product Parameters
Product Model ACU20FD-LC Measurement Range 2SCCM～30SLM Measurement and Control Range Flow meter measurement range ratio 100:1, controller measurement range ratio 50:1 Accuracy ±0.5%F.S Linearity ±0.5%F.S Repeatability ±0.2%F.S Response Time Flow meter: <0.1s Flow controller: <0.2s Digital RS232/485, Modbus protocol, Profibus protocol, Devicenet protocol Analog 0～5V、4-20mA、1～5V Power Supply ±15VDC，24VDC Operating Temperature 0～50℃ Operating Pressure Operating pressure drop: <0.01Mpa Maximum Pressure Resistance 3MPa/10MPa Electrical Connection DB9 port Leak Rate 1×10-10Pa m3/S Temperature Coefficient ±0.025%F.S/℃ Base Material Stainless steel Sealing Material Metal seal Connector 1/4VCR IV. Product Dimensions
V. Optional Matching Measurement and Control Software (Additional Charge Applies)
Mass Flow Measurement and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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