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Product Description
- Product Description
 
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I. Product Overview
◆ Thermal principle, offering higher accuracy and faster response, with Ethernet port
◆ Tubular shunt, resistant to clogging
◆ Suitable for various low-pressure and high-pressure pipelines
◆ Short warm-up time, minimal zero drift, and high reliability
◆ Analog input/output can be controlled and displayed via secondary instruments or flow computers.
The ACU20FD high-precision mass flow meter/flow controller uses the capillary heat transfer method—measuring the temperature difference before and after heat exchange—to accurately determine the mass flow rate of gases, independent of temperature and pressure variations. The flow signal detected by the sensor is first amplified, then compared with a preset voltage. The resulting difference is used to precisely drive and adjust the control valve, enabling closed-loop regulation of the flow rate through the channel until it matches the setpoint value.
II. Product Applications
Glass Industry Solar energy Atmospheric Monitoring Industrial Production Petroleum and Petrochemicals Coal Metallurgy Gas Generation and Gas Distribution Environmental protection Various instrumental analyses III. Product Specifications
Product Model ACU20FD-LC Measurement range 2 SCCM to 30 SLM Measurement and Control Range Flow measurement range ratio: 100:1; Controller range ratio: 50:1 Accuracy ±0.5%F.S Linear ±0.5%F.S Repeatability accuracy ±0.2%F.S Response Time Flow meter: <0.1 s Flow controller: <0.2s Digital quantity RS232/485, Modbus Protocol, Profibus Protocol, DeviceNet Protocol Analog quantity 0–5V, 4–20mA, 1–5V Power Supply ±15VDC, 24VDC Operating Temperature 0~50℃ Work stress Work pressure drop: <0.01 MPa Maximum Withstand Voltage 3MPa/10MPa Electrical Connection DB9 Port Leak rate 1 × 10⁻¹⁰ Pa·m³/s Temperature coefficient ±0.025%F.S/℃ Base material Stainless steel Sealing material Metal Seal Connector 1/4VCR IV. Product Dimension Diagram
V. Optional Supporting Measurement and Control Software (Additional charges apply)
Quality Flow Measurement and Control System V5.0
 
Keyword:
Semiconductor and Microelectronics Manufacturing
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