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EtherCAT protocol
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Product Description
- Product Description
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I. Product Overview
◆ Thermal principle, higher accuracy, faster response, with network port
◆ Tubular flow distribution, not easy to block
◆ Suitable for various low-pressure and high-pressure pipelines
◆ Short preheating time, small zero drift, high reliability
◆ Analog input/output can be used to control and display flow rate using a secondary meter or flow computer
The ACU20FD high-precision mass flow meter/flow controller uses the principle of calorimetry of the temperature difference before and after capillary heat transfer to measure the mass flow rate of gas, which is not affected by temperature and pressure. The flow signal measured by the sensor is amplified and then compared with the set voltage. The obtained difference is used to drive the control regulating valve to close-loop control the flow rate through the channel so that it is equal to the set flow rate.
II. Product Applications
Glass industry Solar energy Atmospheric monitoring Industrial manufacturing Petroleum and petrochemical Coal and metallurgy Gas production and distribution Environmental protection Various instrument analysis III. Product Parameters
Product Model ACU20FD Measurement Range 2SCCM～10000SLM Measurement and Control Range Flow meter measurement range ratio 100:1, controller measurement range ratio 50:1 Accuracy ±0.5%F.S Linearity ±0.5%F.S Repeatability ±0.2%F.S Response Time Flow meter: <0.1s Flow controller: <0.2s Digital EtherCAT protocol Analog 0～5V、4-20mA、1～5V Power Supply ±15VDC，24VDC Operating Temperature 0～50℃ Operating Pressure Operating pressure drop: <0.01Mpa Maximum Pressure Resistance 3MPa/10MPa Electrical Connection DB9 hole Leakage Rate 1×10-9Pa m3/S Temperature Coefficient ±0.025%F.S/℃ Base Material Stainless steel Sealing Material Viton, chloroprene rubber, nitrile rubber Connector φ3，φ6，1/8"，1/4" IV. Optional Matching Measurement and Control Software (Additional Charges Apply)
Mass Flow Measurement and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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