Metal-Sealed EtherCAT Protocol

The ACU20FD digital mass flow meter consists of a mass flow sensor, a laminar flow splitter, a flow-control regulating valve, and an amplification and control circuit. It features digital signal input and output, short warm-up time, minimal zero drift, and high reliability.

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Customized Products

Product attachment:

ACU20FD产品手册 -金属密封EtherCAT协议.pdf

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I. Product Overview

◆ Thermal principle, higher accuracy, faster response, with Ethernet port

◆ Tubular diversion, resistant to clogging

◆ Suitable for various low- and high-pressure pipelines

◆ Short warm-up time, minimal zero drift, and high reliability

◆ Analog input/output can be used with secondary instruments or flow computers to control and display flow.

The ACU20FD high-precision mass flow meter/flow controller measures gas mass flow using the calorimetric method based on the temperature difference across a capillary heat-transfer element, ensuring independence from variations in temperature and pressure. The flow signal detected by the sensor is amplified and compared with a setpoint voltage; the resulting error signal is used to drive a control valve, thereby implementing closed-loop regulation to maintain the flow through the channel at the desired setpoint.

II. Product Applications

Glass industry	Solar energy	Atmospheric Monitoring	Industrial Production	Petroleum and Petrochemical
Coal Metallurgy	Gas production and distribution	Environmental protection	Various instrumental analyses

III. Product Specifications

Product Model	ACU20FD-LC
Measurement range	2 SCCM to 30 SLM
Measurement and control range	Flow measurement range ratio of 100:1; controller range ratio of 50:1.
Accuracy	±0.5% F.S.
Linear	±0.5% F.S.
Repeatability	±0.2% F.S
Response time	Flow meter: <0.1 s
Response time	Flow controller: <0.2s
Digital quantity	RS232/485, Modbus protocol, Profibus protocol, DeviceNet protocol
Analog quantity	0–5 V, 4–20 mA, 1–5 V
Power supply	±15 VDC, 24 VDC
Operating temperature	0–50°C
Work stress	Operating pressure drop: <0.01 MPa
Maximum withstand voltage	3MPa/10MPa
Electrical Connection	DB9 port
Leak rate	1×10⁻¹⁰ Pa·m³/s
Temperature coefficient	±0.025% F.S./°C
Base material	Stainless steel
Sealing material	Metal Sealing
Joint	1/4VCR

IV. Product Dimension Drawing

V. Optional Accompanying Measurement and Control Software (additional charge applies)

　　Mass Flow Measurement and Control System V5.0

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