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Multi-component gas distribution system
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Product Description
- Product Description
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I. Product Overview
The multi-component gas distribution system mainly consists of thermal mass flow controllers, a touch-sensitive LCD display, pressure-reducing valves, solenoid valves, and gas mixing pipelines. It is primarily used for controlling and mixing the flows of various gases.
◆ High-quality materials for cabinets and piping
◆ Easy installation, convenient operation
◆ Precise and rapid flow adjustment
◆ Equipped with various safety gas shut-off methods, including manual valves and solenoid valves.
◆ Multiple gases, rapid mixing
II. Feature Introduction
·Traffic Monitoring and Control
·Electromagnetic valve rapidly shuts off gas
· Can be operated locally and remotely.
·A communication interface can be reserved for communication with field devices (network port/RS485).
·MFC Communication Status Monitoring
·Traffic data recording and export


Keyword:
Semiconductor and Microelectronics Manufacturing
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