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Multi-component gas distribution system

The multi-component gas distribution system mainly consists of thermal mass flow controllers, a touch-sensitive LCD display, pressure-reducing valves, solenoid valves, and gas mixing pipelines. It is primarily used for controlling and mixing the flow rates of various gases.

Product attachment:

Product Description

  • Product Description
  • I. Product Overview

    The multi-component gas distribution system mainly consists of thermal mass flow controllers, a touch-sensitive LCD display, pressure-reducing valves, solenoid valves, and gas mixing pipelines. It is primarily used for controlling and mixing the flows of various gases.

    ◆ High-quality materials for cabinets and piping

    ◆ Easy installation, convenient operation

    ◆ Precise and rapid flow adjustment

    ◆ Equipped with various safety gas shut-off methods, including manual valves and solenoid valves.

    ◆ Multiple gases, rapid mixing

    II. Feature Introduction

    ·Traffic Monitoring and Control

    ·Electromagnetic valve rapidly shuts off gas

    · Can be operated locally and remotely.

    ·A communication interface can be reserved for communication with field devices (network port/RS485).

    ·MFC Communication Status Monitoring

    ·Traffic data recording and export

Keyword:

Semiconductor and Microelectronics Manufacturing

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