undefined
+
  • undefined

Multi-group air distribution system

A multi-group gas distribution system mainly consists of a thermal mass flow controller, a touch LCD screen, a pressure reducing valve, a solenoid valve, and gas mixing pipelines. It is mainly used for flow control and mixing of various gases.

Product attachment:

Product Description

  • Product Description
  • I. Product Overview

    The multi-group gas distribution system mainly consists of a thermal mass flow controller, a touchable LCD screen, a pressure reducing valve, a solenoid valve, and gas mixing pipelines. It is mainly used for flow control and mixing of various gases.

    ◆ High-quality materials for cabinets and pipelines

    ◆ Easy installation and operation

    ◆ Accurate and fast flow adjustment

    ◆ Equipped with manual valves and solenoid valves for safe gas shut-off

    ◆ Rapid mixing of various gases

    II. Function Introduction

    · Flow monitoring and control

    · Solenoid valve for rapid gas shut-off

    · On-site and remote operation available.

    · Communication interface can be reserved for communication with on-site equipment (network port/RS485)

    · MFC communication status monitoring

    · Flow data recording and export

Keyword:

Semiconductor and Microelectronics Manufacturing

Get a quote

Note: Please leave your mobile phone number or email address, and our professionals will contact you as soon as possible!