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Multi-group air distribution system
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Product Description
- Product Description
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I. Product Overview
The multi-group gas distribution system mainly consists of a thermal mass flow controller, a touchable LCD screen, a pressure reducing valve, a solenoid valve, and gas mixing pipelines. It is mainly used for flow control and mixing of various gases.
◆ High-quality materials for cabinets and pipelines
◆ Easy installation and operation
◆ Accurate and fast flow adjustment
◆ Equipped with manual valves and solenoid valves for safe gas shut-off
◆ Rapid mixing of various gases
II. Function Introduction
· Flow monitoring and control
· Solenoid valve for rapid gas shut-off
· On-site and remote operation available.
· Communication interface can be reserved for communication with on-site equipment (network port/RS485)
· MFC communication status monitoring
· Flow data recording and export
Keyword:
Semiconductor and Microelectronics Manufacturing
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