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Gas configuration and control system
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Product attachment:
Product Description
- Product Description
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I. Product Introduction
The multi-group gas distribution system mainly consists of an ACCU thermal mass flow controller and a touchable LCD screen. It is mainly used for multi-channel gas flow measurement and control through remote monitoring by computer, and can be controlled by the flow curve function preset by the computer.
Product Advantages:
◆ High-quality materials
◆ Compact size, high integration
◆ Precise and fast flow adjustment
◆ Multi-channel gas, independent adjustment
◆ Encrypted recording of flow data, safe and reliable
◆ Multi-level user permission allocation
II. Product Display
Dimensions (530mm*550mm*320mm)
Note: Due to different operating conditions, the dimensions may vary. Please refer to the actual product.III. Main Function Introduction
1) Ten-channel flow monitoring and control, can quickly start/stop all flows
2) MFC communication status detection, measurement data (can be encrypted) recording and export, adjustable recording time interval
3) Multi-user hierarchical permission management, custom user password
Keyword:
Semiconductor and Microelectronics Manufacturing
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