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ACU20FD (EtherCAT Protocol Metal-Sealed)
High-Precision Mass Flow Controller (EtherCAT Protocol, Metal-Sealed)
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Product Description
- Product Description
 
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I. Product Overview
◆ Thermal principle, offering higher accuracy and faster response, with Ethernet port
◆ Tubular shunt, resistant to clogging
◆ Suitable for various low-pressure and high-pressure pipelines
◆ Short preheating time, minimal zero drift, and high reliability
◆ Analog input/output can be controlled and displayed via secondary instruments or flow computers.
The ACU20FD high-precision mass flow meter/flow controller uses the capillary heat-transfer method—measuring gas mass flow based on the temperature difference before and after heat transfer—ensuring accurate readings unaffected by temperature or pressure fluctuations. The flow signal detected by the sensor is first amplified, then compared with a preset voltage. The resulting difference is used to precisely drive and adjust the control valve, enabling closed-loop regulation of the flow rate through the channel until it matches the setpoint.
II. Product Applications
Glass Industry Solar energy Atmospheric Monitoring Industrial Production Petroleum and Petrochemicals Coal Metallurgy Gas Generation and Gas Distribution Environmental protection Various instrumental analyses III. Product Specifications
Product Model ACU20FD Measurement range 2SCCM to 10,000 SLM Measurement and Control Range Flow measurement range ratio: 100:1; Controller range ratio: 50:1 Accuracy ±0.5%F.S Linear ±0.5%F.S Repeatability accuracy ±0.2%F.S Response Time Flow meter: <0.1 s Flow controller: <0.2s Digital quantity EtherCAT Protocol Analog quantity 0–5V, 4–20mA, 1–5V Power Supply ±15VDC, 24VDC Operating Temperature 0~50℃ Work stress Work pressure drop: <0.01 MPa Maximum Withstand Voltage 3MPa/10MPa Electrical Connection DB9 Port Leakage rate 1 × 10⁻¹⁰ Pa·m³/s Temperature coefficient ±0.025%F.S/℃ Base material Stainless steel Sealing material Metal Seal Connector 1/4VCR IV. Optional Supporting Measurement and Control Software (Additional charges apply)
Quality Flow Measurement and Control System V5.0
 
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