Product Center
Post-furnace argon blowing detection system
Category:
Product attachment:
Product Description
- Product Description
-
I. Product Overview
The system mainly includes a gas control cabinet, an electrical junction box, and a display alarm system. This device can realize argon gas flow control, pressure regulation, local HMI control, remote HMI control, and on-site manual control; as well as real-time monitoring of pressure and flow, providing a standard 485 communication interface and reserving a 4-20ma channel for communication with the host computer.
II. Product Composition
1. Gas Control Cabinet:
The gas control cabinet includes: 1 main valve, 1 pressure reducing valve, 1 filter pressure reducing valve, 6 other manual valves, gas pipelines, 2 pressure sensor transmitters; and 2 sets of mass flow controllers. It can set the flow rate value, output the flow rate value, and automatically adjust the flow rate to the set value.
2. Electrical Junction Box:
Fixed to the side of the gas control cabinet, it contains all electrical wiring and signal reservation channels.
3. Display Alarm System:
Includes 2 displays, 1 LED signboard, and 1 audible and visual alarm. The two displays are the master and slave stations, respectively, and can display pressure and flow signals, as well as various signal trend charts and the communication status of various devices, and can control the mass flow controller. The LED signboard can also monitor real-time flow and pressure. When the flow and pressure signals exceed the user-set limits, the alarm is triggered.
III. Product Applications
Keyword:
Semiconductor and Microelectronics Manufacturing
Get a quote
Note: Please leave your mobile phone number or email address, and our professionals will contact you as soon as possible!
Contact Information
Address: Room 1522/23,Building B,Ruichuang International Center,No.8Wangjingdong Road,Chaoyang District,Beijing (R&D Department)
Leave a message
If you are interested in our products, please leave your email address, and we will contact you as soon as possible, thank you!