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Aerosol particle counting efficiency calibration system

This system's computer software communicates with various instruments via a MOXA serial server and network switch to control, detect, and calculate the counting efficiency of different particle sizes by particle counters (GRIM CPC and TSI CPC) in real time.

Product Description

  • Product Description
  • I. Product Overview

    This system's computer software communicates with various instruments through a MOXA serial server and network switch to control, detect, and calculate the counting efficiency of different particle sizes by particle counters (GRIM CPC and TSI CPC) in real time.

    II. Hardware Environment

    TSI 3082 Charged Particle Classifier (Model 3080 Electrostatic Classifier)

     TSI 3082 Charged Particle Classifier

    III. Software

    By setting the parameters of 3082 to obtain aerosol particles of a specified size (1~1000 nm), after the start of sampling, the particles are passed through an electrometer and then to the counter. The software will record the real-time instrument data to an excel spreadsheet and calculate the counting efficiency of each counter based on the given parameters.

Keyword:

Semiconductor and Microelectronics Manufacturing

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