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ACU20CEM
ACU20CEM
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Product Description
- Product Description
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I. Product Overview
The ACCU gas-liquid mixed evaporation system consists of five parts: a liquid flow controller (for controlling the liquid source flow rate), one or more gas mass flow controllers (for controlling the carrier gas flow rate), a temperature-adjustable mixed evaporator (for liquid vaporization); an optional flow and temperature display controller (for setting flow rate and temperature), and an optional post-vaporization dilution gas flow controller (for diluting the output vapor).
◆A typical CEM system is shown in Figure 1, where a three-way display controller connects and independently controls the liquid flow, gas flow, and evaporation temperature. A PLC and DCS system can replace the display controller, achieving centralized control through protocols such as MODBUS or DEVICENET.
◆According to site needs, one or more carrier gas flow controllers can be added to achieve multi-component carrier gas injection.
◆A three-way valve can be added to the steam outlet, connecting a gas mass flow controller to dilute the output steam.
Figure 1, Typical CEM System
II. Technical Parameters
2.1 Temperature-Controllable Mixed Evaporator
Product Model ACU20CEM Maximum Vaporization Capacity 1200g/h Pressure Rating 10MPA Maximum Temperature 300℃ Connector VCR, Compression Fitting 2.2 Flow/Temperature Display Controller
Product Model ACU20CEM Power Supply 220V Analog Signal 0-5V or 4-20mA Digital Signal MODBUS (RS232/485), PROFIBUS, DEVICENET protocols Display Type LCD with Touchscreen III. Applications
IV. Optional Matching Monitoring and Control Software (Additional charges apply)
Mass Flow Monitoring and Control System V5.0
Keyword:
Semiconductor and Microelectronics Manufacturing
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